AMAT Applied Materials 0100-01222控制器模块 PDF资料
1.产 品 资 料 介 绍：
产品概述
AMAT 0100-01222 控制器模块是一款应用于半导体制造设备的控制电路板组件。该模块常见于 Reflexion CMP 化学机械抛光系统，主要作用是作为气动控制单元（Head Pneumatic Controller Board），对多路气体或真空接口进行控制和分配。
技术参数（基于行业信息和命名推断）
模块类型：控制电路板（Controller Module / PCB Assembly）
控制通道：4 通道（4-Port 配置，用于多路气动接口控制）
主要功能：
驱动和管理气动执行器或阀门
负责 CMP 工艺中气垫头（pneumatic head）的压力控制与切换
应用系统：AMAT Reflexion 系列 CMP 工艺设备
安装形式：机柜内 PCB 板卡，带标准电气接口
应用场景
CMP 工艺控制
用于抛光头气压分配，保持抛光过程的稳定性和均匀性。
气动控制系统
控制多通道气路，实现工艺气体或真空切换。
半导体设备维护与备件
作为 AMAT 原厂备件，用于系统维修与更换。
产品优势
专用性强：为 AMAT CMP 系统定制，能与原厂设备无缝兼容。
多通道控制：支持 4 路气动接口，提升工艺灵活性。
模块化设计：作为独立控制板，便于更换和维护。
稳定可靠：满足半导体工艺对气路控制的高精度和高稳定性需求。
AMAT Applied Materials 100-01222控制器模块 英文资料：
Product Overview
The AMAT 0100-01222 controller module is a control circuit board component used in semiconductor manufacturing equipment. This module is commonly used in Reflexion CMP chemical mechanical polishing systems, mainly serving as a Head Pneumatic Controller Board to control and distribute multiple gas or vacuum interfaces.
Technical parameters (based on industry information and naming inference)
Module type: Controller Module/PCB Assembly
Control channel: 4-channel (4-port configuration, used for multi-channel pneumatic interface control)
Main functions:
Drive and manage pneumatic actuators or valves
Responsible for pressure control and switching of pneumatic head in CMP process
Application System: AMAT Reflexion Series CMP Process Equipment
Installation form: PCB board inside the cabinet, with standard electrical interfaces
Application scenarios
CMP process control
Used for distributing air pressure in polishing heads to maintain stability and uniformity during the polishing process.
Pneumatic Control
Control multi-channel gas paths to achieve process gas or vacuum switching.
Semiconductor equipment maintenance and spare parts
As an AMAT original spare part, used for system maintenance and replacement.
Product advantages
Strong specificity: Customized for AMAT CMP system, seamlessly compatible with original equipment.
Multi channel control: supports 4 pneumatic interfaces to enhance process flexibility.
Modular design: As an independent control board, it is easy to replace and maintain.
Stable and reliable: Meet the high-precision and high stability requirements of semiconductor processes for gas path control.
AMAT Applied Materials 100-01222控制器模块 产品展示
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KUC755AE105 驱动电源
KUC321AE 伺服控制器
4.其他英文产品
TRICONEX 4351A Channel input module
TRICONEX 4400 Channel output module
TRICONEX 4409S Channel contact module
| STF3640-4977-61-56BC | SC403-014 | SC933-001-NN-01 |
| STF3624-5604-61-56C | SC402-024-T2 | SC933-001-01 |
| STF3624-4976-61-56BC | SC403-013-T2 | SC753A-040-08 |
| STC3720-4085-56C | SC403-013-T4 | SC90200101NNN |
| SRF5570-4986-84-5-82BC-CU | SC403-001-T1 | SC933-NN-001-01 |
| SRF5570-4483-84-82BC | SC402-001-T4 | SC756B-001-01 |
| SRF5360-4985-84-5-82BC-CU | SC402-048-T4 | SC905-001-01 |
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