Gasonics 89-1036-01接口模块 PDF资料
1.产 品 资 料 介 绍:
产品名称
Gasonics 90‑1036‑01 接口模块(MFC/MFM Interface Module)
一、产品概述
Gasonics 90‑1036‑01 是一款专为 Gasonics Aura 等离子清洗设备设计的接口模块,主要用于将质量流量控制器(MFC)或质量流量计(MFM)与主控制系统进行信号传输和接口连接。
二、技术参数
功能类型:MFC/MFM 接口模块
兼容设备:主要适配 Gasonics Aura 系列设备
通信接口:实现 MFC 设备的信号接入与主控电路通信
模块形式:PCB 插卡结构,适配设备背板安装
供电与连接:从主控模块供电,并提供 MFC 信号通道连接
状态指示:板上可能具备状态 LED 指示(具体版本依 revision 不同)
三、应用场景
将 MFC 或 MFM 输出信号传输至 Gasonics 主控系统
在设备运行过程中进行气体流量监控与调节
与其他接口卡协同,实现完整的气路控制与反馈逻辑
四、产品优势
专为 Gasonics Aura 系统设计,兼容性高
性能可靠,支持稳定的气体流量信号传输
结构标准化,易于安装与现场替换
可在现场维修或停产设备中作为替代接口模块
英文资料:
product name
Gasonics 90-1036-01 Interface Module (MFC/MFM Interface Module)
1、 Product Overview
Gasonics 90-1036-01 is an interface module designed specifically for Gasonics Aura plasma cleaning equipment, mainly used for signal transmission and interface connection between mass flow controllers (MFCs) or mass flow meters (MFMs) and the main control system.
2、 Technical parameters
Function type: MFC/MFM interface module
Compatible devices: mainly compatible with Gasonics Aura series devices
Communication interface: Implement signal access and main control circuit communication for MFC devices
Module form: PCB card insertion structure, compatible with device backplane installation
Power supply and connection: Power is supplied from the main control module and MFC signal channel connection is provided
Status indication: The board may have status LED indicators (specific versions vary depending on the revision)
3、 Application scenarios
Transmit MFC or MFM output signals to Gasonics main control system
Monitoring and regulating gas flow during equipment operation
Collaborate with other interface cards to achieve complete pneumatic control and feedback logic
4、 Product advantages
Specially designed for Gasonics Aura system, high compatibility
Reliable performance, supporting stable gas flow signal transmission
Standardized structure, easy to install and replace on site
Can be used as a substitute interface module in on-site maintenance or discontinued equipment
2.产 品 展 示
3.其他产品
KOLLMORGEN CB06561 PRD-B040SSLZ-62伺服驱动器
Gespac GESOUT-3 OUT-3B 模拟量输入输出模块
4.其他英文产品
ASEA DSCA121 Robot Control Board
KOLLMORGEN CP310250 servo driver
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