Gasonics UNO-1497温度控制器 PDF资料
1.产 品 资 料 介 绍：
产品名称
Gasonics UNO-1497 温度控制器
（英文：Temperature Controller Module）
一、产品概述
Gasonics UNO-1497 是 Gasonics 系列等离子灰化、清洗设备中使用的 专用温度控制器模块，用于精确调节并监测工艺腔体、加热器、热板等部位的温度。该控制器能够实时采集热电偶信号，并输出控制信号给加热元件，实现闭环温度控制，确保工艺一致性和热稳定性。
二、技术参数
模块类型：温度控制器 / 工艺温控模块
温度输入信号：
支持 K 型、J 型等标准热电偶输入
控制通道：
单通道或多通道温控（取决于配置）
控制输出：
模拟电压 / 电流信号控制加热器
或继电器/SSR 信号输出控制加热电源
控制方式：
PID 闭环控制（自动或手动模式）
输出功率控制精度：
可设定上下限报警值与比例/积分/微分参数
供电要求：
+24 VDC 或 ±15 VDC（依设备配置）
通讯接口：
与主控模块通过背板或串行接口通信
状态显示：
前面板带有温度显示窗口和报警状态指示灯
英文资料：
product name
Gasonics UNO-1497 Temperature Controller
(Temperature Controller Module)
1、 Product Overview
Gasonics UNO-1497 is a specialized temperature controller module used in the Gasonics series plasma ashing and cleaning equipment to accurately regulate and monitor the temperature of process chambers, heaters, hot plates, and other parts. This controller is capable of real-time acquisition of thermocouple signals and outputting control signals to heating elements, achieving closed-loop temperature control and ensuring process consistency and thermal stability.
2、 Technical parameters
Module Type: Temperature Controller/Process Temperature Control Module
Temperature input signal:
Supports standard thermocouple inputs such as K-type and J-type
Control channel:
Single channel or multi-channel temperature control (depending on configuration)
Control output:
Simulate voltage/current signal to control heater
Or relay/SSR signal output controls heating power supply
Control method:
PID closed-loop control (automatic or manual mode)
Output power control accuracy:
Can set upper and lower limit alarm values and proportional/integral/derivative parameters
Power supply requirements:
+24 VDC or ± 15 VDC (depending on equipment configuration)
Communication interface:
Communicate with the main control module through the backplane or serial interface
Status display:
The front panel is equipped with a temperature display window and an alarm status indicator light
2.产 品 展 示
3.其他产品
4.其他英文产品
ASEA 2668 0002-AE Connection Unit Circui
ABB P8840 8-channel temperature module
| PMB31D-00100-02 | IMASM03 | 61031 Terminal Block, Relay |
| PMB31D-00100-01 | NKMP11 | PFVL141R |
| PMB31D-00100-00 | AMAT 0100-13011 | PFEA111 |
| PMB31B-20216-03 | 70 FA 01b | 3ASD573001A13 YPK112A |
| PMB31B-20216-02 | IIMCL01 | 57120001-KH DSTA 156 |
| PMB31B-20216-01 | 70 BL 02C | R32GENC-TS-NS-VS-00 |
| PMB31B-20216-00 | AMAT 0100-09136 | 57160001-P DSTD 120 |
