Gasonics A90-039-02电流传感器模块 PDF资料
1.产 品 资 料 介 绍:
产品名称
Gasonics A90-039-02 电流传感器模块
(英文:Current Sensor Module)
一、产品概述
Gasonics A90-039-02 是专用于 Gasonics 系列等离子清洗/灰化设备中的 电流监测模块,用于实时检测设备内部电源回路、电磁阀、加热单元、射频系统等关键部件的工作电流。该模块提供隔离信号输出,传送至主控系统用于工艺控制、安全保护及故障报警。
二、技术参数
模块类型:电流传感器 / 电流检测模块
设备适配:适用于 Gasonics Aura、L2100、L3510、AE2001 等设备
测量范围:典型电流范围为 0–20A(视具体配置)
输出信号:
模拟电压输出(比例输出,典型为 0–5V 或 0–10V)
或电流信号(如 4–20 mA,视设备配置)
电气隔离:具备输入与输出之间的光电/磁隔离
安装方式:模块化卡件结构,可插拔安装于设备背板或功能卡架中
接口方式:标准端子或排线连接至主控制模块或数据采集卡
供电要求:+15V 或 +24V DC
指示功能:模块面板可能带有运行状态 LED
英文资料:
product name
Gasonics A90-039-02 Current Sensor Module
(English: Current Sensor Module)
1、 Product Overview
Gasonics A90-039-02 is a current monitoring module specifically designed for the Gasonics series plasma cleaning/ashing equipment, used for real-time detection of the working current of key components such as internal power circuits, solenoid valves, heating units, and RF systems. This module provides isolated signal output, which is transmitted to the main control system for process control, safety protection, and fault alarm.
2、 Technical parameters
Module Type: Current Sensor/Current Detection Module
Equipment adaptation: Suitable for Gasonics Aura, L2100, L3510, AE2001 and other devices
Measurement range: Typical current range is 0-20A (depending on specific configuration)
Output signal:
Analog voltage output (proportional output, typically 0-5V or 0-10V)
Or current signal (e.g. 4-20 mA, depending on device configuration)
Electrical isolation: with photoelectric/magnetic isolation between input and output
Installation method: Modular card structure, pluggable and installed in the equipment backplane or functional card rack
Interface method: Connect standard terminals or ribbon cables to the main control module or data acquisition card
Power supply requirements:+15V or+24V DC
Indication function: The module panel may have a running status LED
2.产 品 展 示
3.其他产品
4.其他英文产品
ASEA SNAT7600 driver control circuit board
ABB 3DDE300417 Input/Output Board
PMB31D-00116-02 | NMFC04 | N32HRLJ-LNK-NS-00 |
PMB31D-00116-01 | 07KT60R101 | PFCL201 50.0KN |
PMB31D-00116-00 | PHCBRCPBA10000 | 3BSE004253R1 SX540 |
PMB31D-00114-03 | AMAT 0130-20335 | M22NRXB-LNN-NS-02 |
PMB31D-00114-02 | 07BV60R1 | 57160001-LF DSTD 133 |
PMB31D-00114-01 | 70 AS 06a-E | PWM3636-5486-7 |