Gasonics 90-2736 控制器模块 PDF资料
1.产 品 资 料 介 绍：
产品名称
Gasonics 90-2736 控制器模块
（英文：Gasonics Controller Module）
一、产品概述
Gasonics 90-2736 控制器模块是应用于 Gasonics 系列等离子体灰化设备中的核心控制部件，主要用于协调设备内部各子系统的运行状态，包括气体流量、温控、射频匹配、电源分配等。该模块作为设备主控系统的组成部分，与其他 I/O 卡、阀控卡、温控模块等配合，实现全自动工艺控制逻辑。
二、技术参数
模块类型：主控制器/系统控制逻辑模块
所属设备平台：Gasonics Aura、L2100、L3510、AE2001 等系列等离子体设备
接口类型：
背板连接（Backplane Bus）
标准信号线连接至 I/O 控制板、阀控模块、温控卡等
输入信号：
来自操作界面、传感器（温度、压力、RF功率）
输出控制：
发出控制信号至阀控、电源、温控、电磁继电器等子模块
功能特性：
工艺序列控制
安全互锁逻辑管理
故障报警触发与状态回馈
电源需求：+5V、+12V 或 ±15V DC（视具体硬件配置）
状态反馈：带 LED 状态灯，用于显示运行与故障状态
英文资料：
product name
Gasonics 90-2736 Controller Module
Gasonics Controller Module
1、 Product Overview
The Gasonics 90-2736 controller module is the core control component applied in the Gasonics series plasma ashing equipment, mainly used to coordinate the operation status of various subsystems inside the equipment, including gas flow rate, temperature control, RF matching, power distribution, etc. As a component of the equipment control system, this module works in conjunction with other I/O cards, valve control cards, temperature control modules, etc. to achieve fully automatic process control logic.
2、 Technical parameters
Module Type: Main Controller/System Control Logic Module
Equipment platform: Gasonics Aura, L2100, L3510, AE2001 and other series plasma equipment
Interface type:
Backplane Bus connection
Standard signal lines are connected to I/O control boards, valve control modules, temperature control cards, etc
Input signal:
From the operating interface, sensors (temperature, pressure, RF power)
Output control:
Send control signals to sub modules such as valve control, power supply, temperature control, electromagnetic relay, etc
Functional features:
Process sequence control
Security interlock logic management
Fault alarm triggering and status feedback
Power requirements:+5V,+12V, or ± 15V DC (depending on specific hardware configuration)
Status feedback: equipped with LED status lights, used to display operation and fault status
2.产 品 展 示
3.其他产品
4.其他英文产品
Asea 2668 170-3 Pcb Circuit Board
ASEA SNAT7600 driver control circuit board
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| PMB31D-00201-01 | AMAT 0100-20062 | PFTL101B 10.0KN 3BSE004197R1 |
