Gasonics 90-1002-02阀控制模块 PDF资料
1.产 品 资 料 介 绍：
产品名称
Gasonics 90-1002-02 阀控制模块
（英文：Valve Control Module）
一、产品概述
Gasonics 90-1002-02 阀控制模块是 Gasonics（现为 Novellus Systems，一部分并入 Lam Research）等离子体灰化和清洗设备中用于 控制气体或真空系统阀门开闭 的关键部件。该模块通过接收来自主控系统的控制信号，实现多个气路阀门的精准开关控制，确保等离子工艺过程中气体流量和工艺气氛的准确调节。
二、技术参数
设备类型：气体/真空阀门控制模块
控制通道：多通道电磁阀控制（具体通道数视配置而定）
输入信号：
TTL 或 24VDC 控制信号（来自主控板或 PLC）
输出形式：
控制电磁阀开启或关闭状态（ON/OFF）
供电要求：
一般为 +24 VDC（模块供电与阀驱动）
状态指示：
板载 LED 指示每通道阀门状态
接口方式：
插槽式连接或背板连接
与主控制器或 I/O 卡通过内部总线通信
适配机型：
兼容 Gasonics Aura、L3510、L2100、AE2001 等多型号等离子体设备
英文资料：
product name
Gasonics 90-1002-02 Valve Control Module
Valve Control Module
1、 Product Overview
The Gasonics 90-1002-02 valve control module is a key component used in Gasonics (now known as Novellus Systems, partially integrated into Lam Research) plasma ashing and cleaning equipment to control the opening and closing of gas or vacuum system valves. This module achieves precise on/off control of multiple gas path valves by receiving control signals from the main control system, ensuring accurate adjustment of gas flow rate and process atmosphere during the plasma process.
2、 Technical parameters
Equipment type: Gas/Vacuum Valve Control Module
Control channel: Multi channel solenoid valve control (the specific number of channels depends on the configuration)
Input signal:
TTL or 24VDC control signal (from main control board or PLC)
Output format:
Control the opening or closing status of the solenoid valve (ON/OFF)
Power supply requirements:
Usually+24 VDC (module power supply and valve drive)
Status indication:
Onboard LED indicates the status of each channel valve
Interface method:
Slot type connection or backplane connection
Communicate with the main controller or I/O card through an internal bus
Compatible models:
Compatible with multiple plasma equipment models such as Gasonics Aura, L3510, L2100, AE2001, etc
2.产 品 展 示
3.其他产品
4.其他英文产品
AMAT 0190-11415 Digital Input Module
ABB XVC768117 Field Input/Output Module
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