Gasonics A90-002-01放大器板 PDF资料
1.产 品 资 料 介 绍:
产品名称
Gasonics A90-002-01 放大器板
产品应用领域
真空计信号放大
用于 Gasonics 等离子设备中,放大真空计传感器输出的微弱信号,确保真空状态的精准监测。等离子体工艺控制
作为等离子体处理系统的一部分,提供实时的真空压力数据,辅助工艺参数的调整与控制。设备安全保障
通过监测真空状态,防止因真空异常导致的设备故障或工艺失败,提升系统稳定性。模块化系统集成
作为模块化控制系统中的一环,与其他控制板协同工作,实现设备的自动化与智能化管理。设备维护与备件更换
在设备出现真空信号异常时,作为标准备件用于更换,恢复设备的正常运行。
英文资料:
product name
Gasonics A90-002-01 amplifier board
Product application areas
Vacuum gauge signal amplification
Used in Gasonics plasma equipment to amplify the weak signal output from the vacuum gauge sensor, ensuring accurate monitoring of the vacuum state.
Plasma process control
As a part of the plasma processing system, it provides real-time vacuum pressure data to assist in adjusting and controlling process parameters.
Equipment security guarantee
By monitoring the vacuum status, equipment failure or process failure caused by abnormal vacuum can be prevented, and system stability can be improved.
Modular system integration
As a part of the modular control system, it collaborates with other control boards to achieve automation and intelligent management of equipment.
Equipment maintenance and spare parts replacement
When the vacuum signal of the equipment is abnormal, it is used as a standard spare part for replacement to restore the normal operation of the equipment.
2.产 品 展 示
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