Gasonics 90-2588控制器模块 PDF资料
1.产 品 资 料 介 绍：
产品名称
Gasonics 90-2588 控制器模块
产品应用领域
等离子设备核心控制单元
作为 Gasonics 等离子灰化或蚀刻系统中的主控制模块，负责整体工艺流程的管理与执行。工艺参数调节与监控
控制气体流量、射频功率、温度和机械动作等关键工艺参数，确保工艺稳定性和良率。信号处理与设备协调
集成输入/输出接口，协调各子系统间的通信，实现多模块同步工作。自动化流程控制支持
支持设备自动运行、工艺步骤顺序执行及异常状态处理，提高生产效率和安全性。设备维护与模块替换
用于设备故障维修或系统升级，替换原有控制模块，保障设备持续稳定运行。系统诊断与故障报警
提供故障检测、报警输出及状态反馈功能，辅助维护人员快速定位和解决问题。
英文资料：
product name
Gasonics 90-2588 Controller Module
Product application areas
Core control unit of plasma equipment
As the main control module in Gasonics plasma ashing or etching systems, responsible for managing and executing the overall process flow.
Process parameter adjustment and monitoring
Control key process parameters such as gas flow rate, RF power, temperature, and mechanical action to ensure process stability and yield.
Signal processing and equipment coordination
Integrate input/output interfaces, coordinate communication between subsystems, and achieve synchronized operation of multiple modules.
Automated process control support
Support automatic operation of equipment, sequential execution of process steps, and handling of abnormal states to improve production efficiency and safety.
Equipment maintenance and module replacement
Used for equipment malfunction repair or system upgrade, replacing the original control module to ensure the continuous and stable operation of the equipment.
System diagnosis and fault alarm
Provide fault detection, alarm output, and status feedback functions to assist maintenance personnel in quickly locating and solving problems.
2.产 品 展 示
3.其他产品
ABB UFC933A102 3BHE048062R0102 电路板
4.其他英文产品
ABB UN0942b-P Programmable Controller
Teknic SST-1500-XCX Digital Servo Drive
| PMB33E-20216-01 | AMAT 0100-90941 | P22NRXB-LDF-NS-00 |
| PMB33E-20216-00 | 07BE62R1 | 5730030-UR DSAO 130 |
| PMB33E-20214-03 | IMCOM04 | 57160001-SH DSTD 306 |
| PMB33E-20214-02 | DIO00 | PWM3624-5579-7-1 |
| PMB33E-20214-01 | 07EA90-S | P22NSXC-LNN-NS-02 |
| PMB33E-20214-00 | IPCHS02 | 57120001-PC DSAX 110 |
