Gasonics 001-6618-02直流电机 PDF资料
1.产 品 资 料 介 绍：
产品名称
Gasonics 001-6618-02 直流电机
产品应用领域
半导体设备驱动系统
用于 Gasonics 等离子处理设备中的机械运动驱动，如晶圆传输机构、阀门驱动或电梯系统。高精度位置控制
适用于要求精确速度和位置控制的应用场景，确保设备动作的稳定和重复性。自动化搬运与执行
作为自动上下料、机械手臂及执行机构的动力源，支持连续高效的生产作业。洁净室环境兼容
设计符合洁净室要求，减少粉尘和颗粒污染，保障半导体制造环境的洁净度。设备维护与备件更换
作为标准备件，用于替换损坏或性能下降的电机，恢复设备机械运动功能。实验与研发设备应用
用于研发阶段的机械运动测试及工艺验证，支持多种工况下的驱动需求。
英文资料：
product name
Gasonics 001-6618-02 DC Motor
Product application areas
Semiconductor Device Driver System
Used for mechanical motion drive in Gasonics plasma processing equipment, such as wafer transfer mechanisms, valve drives, or elevator systems.
High precision position control
Suitable for application scenarios that require precise speed and position control, ensuring the stability and repeatability of device actions.
Automated handling and execution
As a power source for automatic loading and unloading, robotic arms, and actuators, it supports continuous and efficient production operations.
Cleanroom environment compatibility
The design meets the requirements of a clean room, reduces dust and particle pollution, and ensures the cleanliness of the semiconductor manufacturing environment.
Equipment maintenance and spare parts replacement
As a standard spare part, it is used to replace damaged or degraded motors and restore the mechanical motion function of the equipment.
Application of experimental and R&D equipment
Used for mechanical motion testing and process validation during the R&D phase, supporting driving requirements under various working conditions.
2.产 品 展 示
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| PMB33F-00114-00 | INICT01 | 3BSE003848R1 |
| PMB33F-00101-03 | 07ZE62R302 | 57160001-ZL DSTD W113 |
| PMB33F-00101-02 | AMAT 0100-A2630 | P22NSXA-LSS-SS-03 |
| PMB33F-00101-01 | INIPT01 | 3BSE018312R1 DSTA 181 |
| PMB33F-00101-00 | 07EA200 | 57160001-ACT DSDP 140 |
| PMB33F-00100-03 | NTCS04 | P2HNRXC-LNN-NS-00 |
