Gasonics 90-2735联锁板 PDF资料
1.产 品 资 料 介 绍：
产品名称
Gasonics 90-2735 联锁板
产品应用领域
安全联锁控制系统
负责半导体等离子设备中的安全联锁逻辑，实现门盖、腔体压力、气体流量等关键安全参数的监测与控制。设备保护与故障防范
当检测到异常状态（如门未关闭、真空不足等）时，自动切断相关系统电源或停止工艺运行，防止设备损坏和人员伤害。多信号输入输出管理
汇集多个安全信号，处理并输出联锁结果，协调设备各安全子系统之间的互锁关系。工艺流程安全保障
确保在工艺步骤执行前，所有安全条件满足，避免因误操作或异常引发事故。模块化集成于控制架构
作为设备控制系统的安全接口模块，便于维护、更换和升级。设备维护与故障诊断辅助
支持故障状态指示和诊断，帮助维护人员快速定位安全相关故障。
英文资料：
product name
Gasonics 90-2735 Interlocking Board
Product application areas
Safety interlock control system
Responsible for the safety interlock logic in semiconductor plasma equipment, monitoring and controlling key safety parameters such as door cover, chamber pressure, and gas flow rate.
Equipment protection and fault prevention
When abnormal conditions are detected (such as doors not closed, insufficient vacuum, etc.), the relevant system power is automatically cut off or the process operation is stopped to prevent equipment damage and personnel injury.
Multi signal input/output management
Collect multiple safety signals, process and output interlocking results, and coordinate the interlocking relationships between various safety subsystems of the equipment.
Process safety assurance
Ensure that all safety conditions are met before executing the process steps to avoid accidents caused by misoperation or abnormalities.
Modular integration into control architecture
As a secure interface module for equipment control systems, it is easy to maintain, replace, and upgrade.
Equipment maintenance and fault diagnosis assistance
Support fault status indication and diagnosis, helping maintenance personnel quickly locate safety related faults.
2.产 品 展 示
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| PMB33F-00216-03 | CT 370a | R43HMAA-R2-NS-VS-00 |
| PMB33F-00216-02 | 70AA01a-E | R45GCNA-TS-NS-NV-00 |
| PMB33F-00216-01 | 70AA02B-E | P21NRXA-LNF-NS-00 |
| PMB33F-00216-00 | 70FV01B-E | P22NRXA-LSF-NS-02 |
| PMB33F-00214-03 | 70BK02B-E | M21NRXB-LDN-NS-00 |
| PMB33F-00214-02 | 70 WB 01a | P21NRXD-LNN-NS-00 |
