Gasonics PH268M-E068晶圆提升电机 PDF资料
1.产 品 资 料 介 绍：
产品名称
Gasonics PH268M-E068 晶圆提升电机
产品应用领域
半导体制造设备晶圆升降控制
用于 Gasonics 等离子处理设备中，驱动晶圆在负载锁腔或工艺腔内的垂直升降，完成晶圆的精确定位与传输。自动化搬运系统关键执行部件
作为自动上下料机械装置中的核心动力单元，配合传感器实现晶圆的安全升降和位置反馈。高精度运动控制应用
适用于需要微米级控制精度的晶圆处理过程，保证升降平稳，减少机械振动和位移误差。洁净室兼容设计
满足半导体制造对洁净度的严格要求，适合洁净室环境使用，减少颗粒污染。设备维修与替换部件
用于替换损坏或老化的晶圆升降电机，恢复设备正常的机械动作功能，确保生产连续性。研发及实验设备应用
在设备开发和测试阶段，作为升降系统的动力来源，支持工艺流程验证与优化。
英文资料：
product name
Gasonics PH268M-E068 wafer lifting motor
Product application areas
Semiconductor manufacturing equipment wafer lifting control
Used in Gasonics plasma processing equipment to drive the vertical lifting and lowering of wafers in load lock chambers or process chambers, achieving precise positioning and transfer of wafers.
Key execution components of automated handling system
As the core power unit in the automatic loading and unloading mechanical device, it cooperates with sensors to achieve safe lifting and position feedback of wafers.
Application of high-precision motion control
Suitable for wafer processing processes that require micrometer level control accuracy, ensuring smooth lifting and reducing mechanical vibration and displacement errors.
Cleanroom compatible design
Meet the strict cleanliness requirements of semiconductor manufacturing, suitable for use in clean room environments, and reduce particle pollution.
Equipment maintenance and replacement parts
Used to replace damaged or aged wafer lifting motors, restore normal mechanical operation of equipment, and ensure production continuity.
Research and experimental equipment application
During the equipment development and testing phase, as the power source for the lifting system, it supports process validation and optimization.
2.产 品 展 示
3.其他产品
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