Gasonics A90-040-01加热器模块 PDF资料
1.产 品 资 料 介 绍：
产品名称
Gasonics A90-040-01 加热器模块
产品应用领域
半导体等离子设备加热控制
用于 Gasonics Aura 系列等离子灰化或蚀刻设备中的加热元件控制，调节加热台、样品架等部件的温度。温度稳定与工艺优化
通过精准控制加热器功率，实现工艺温度的恒定，保障半导体制造过程的稳定性和良率。工艺保护与过温防护
集成过温保护功能，防止加热器超温损坏设备或工件，提升设备安全性。自动化温控系统组成
与温度传感器和控制器配合，实现闭环加热控制，自动调整加热功率以满足工艺需求。设备维修与备件替换
作为设备维护中的重要模块，用于更换损坏的加热控制单元，恢复设备正常加热功能。实验室及研发设备应用
在实验室环境或研发测试设备中用于模拟或控制加热过程，支持工艺开发与测试。
英文资料：
product name
Gasonics A90-040-01 Heater Module
Product application areas
Heating control of semiconductor plasma equipment
Used for controlling heating elements in Gasonics Aura series plasma ashing or etching equipment, adjusting the temperature of heating tables, sample racks, and other components.
Temperature stability and process optimization
By precisely controlling the power of the heater, the constant process temperature is achieved, ensuring the stability and yield of the semiconductor manufacturing process.
Process protection and over temperature protection
Integrated over temperature protection function to prevent the heater from overheating and damaging equipment or workpieces, enhancing equipment safety.
Composition of Automated Temperature Control System
Cooperate with temperature sensors and controllers to achieve closed-loop heating control, automatically adjust heating power to meet process requirements.
Equipment maintenance and spare parts replacement
As an important module in equipment maintenance, it is used to replace damaged heating control units and restore the normal heating function of the equipment.
Laboratory and R&D equipment application
Used in laboratory environments or R&D testing equipment to simulate or control heating processes, supporting process development and testing.
2.产 品 展 示
3.其他产品
Kollmorgen MMC-SD-0.5-230-D伺服驱动器
4.其他英文产品
ASEA 57360001-AN circuit board
LAM 810-800081-016 CPU motherb
Siemens 6ES7291-8GC00-0XA0 cartridge
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| R46GENA-R2-NS-NV-00 | R32GENC-HS-ND-NV-00 | S33HSNA-RNNM-02 |
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| R46GEBA-R2-NS-VS-00 | R45GENA-R2-NS-NV-00 | S21HNNA-RNN6-00 |
| R46GEBA-R2-NS-NV-02 | R22H5NA-R1-NS-NV-17 | R24SSNA-R1-NS-NV-03 |
| R46GEBA-R2-NS-NV-00 | SC103-001-T2 | S32GNNA-RNVM-00 |
