Gasonics 90-2627温度监测器 PDF资料
1.产 品 资 料 介 绍：
产品名称
Gasonics 90-2627 温度监测器
产品应用领域
半导体等离子处理设备温度监控
用于监测等离子灰化、蚀刻设备中关键部件的温度，如加热台、腔体内部及相关传感器，确保工艺温度维持在设定范围内。工艺安全保护系统
通过实时温度监测，防止过热或温度异常导致设备损坏，触发报警或联锁保护，保障设备和操作人员安全。温度数据采集与反馈
将温度信号转换为电气信号，传送至主控系统或显示单元，用于工艺参数调整和设备运行监控。自动化温控系统组成部分
集成于气体流量、射频功率等自动调节系统，实现闭环温度控制，提升工艺稳定性与良率。设备维护与故障诊断
作为维护工具之一，帮助技术人员快速检测温度异常原因，辅助设备故障定位与修复。实验室及研发设备温度监测
应用于实验室或研发阶段的半导体设备中，提供精准温度数据支持工艺优化。
英文资料：
product name
Gasonics 90-2627 Temperature Monitor
Product application areas
Temperature monitoring of semiconductor plasma processing equipment
Used to monitor the temperature of key components in plasma ashing and etching equipment, such as heating tables, chambers, and related sensors, to ensure that the process temperature is maintained within the set range.
Process safety protection system
By real-time temperature monitoring, equipment damage caused by overheating or abnormal temperature can be prevented, triggering alarms or interlocking protection to ensure the safety of equipment and operators.
Temperature data collection and feedback
Convert temperature signals into electrical signals and transmit them to the main control system or display unit for process parameter adjustment and equipment operation monitoring.
Components of automated temperature control system
Integrated into automatic adjustment systems such as gas flow rate and RF power, achieving closed-loop temperature control and improving process stability and yield.
Equipment maintenance and fault diagnosis
As one of the maintenance tools, it helps technicians quickly detect the cause of temperature abnormalities and assists in equipment fault location and repair.
Temperature monitoring of laboratory and R&D equipment
Applied to semiconductor equipment in the laboratory or research and development stage, providing precise temperature data to support process optimization.
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