Gasonics 06764-005控制板 PDF资料
1.产 品 资 料 介 绍：
产品名称
Gasonics 06764-005 控制板
产品应用领域
等离子去胶/清洗设备主控与协同
在 Gasonics 等离子处理设备中承担子系统协调控制，管理工艺流程、状态机与故障联锁。晶圆搬运与机构控制
与电机驱动、气动模块配合，控制传送臂、升降平台、夹持/释放等动作，保证上下片与转运节拍。负载锁与真空联锁控制
处理负载锁门禁、腔体压强门限、抽气与充气顺序等逻辑，确保真空环境与安全互锁。气路/阀门与工艺介质管理
驱动电磁阀、质量流量控制相关的开关与反馈采集，实现气体进给、排放及吹扫序列控制。温控与工艺监测接口
采集加热台、腔体温度与相关传感器信号，并向上位或执行单元输出控制量，用于恒温与过温保护。RF/电源子系统使能与保护
对射频电源、偏置电源等进行使能/禁止控制与状态监测，参与过流、过压、过热等联锁保护。I/O 汇聚与上位机通信
作为设备内部 I/O 汇聚节点，完成与人机界面/上位工控机的数据交换，支持报警、事件与配方执行反馈。维保与替换升级场景
用于 Aura 系列等机型的备件更换与故障修复；在旧机翻新中作为兼容控制板，恢复设备运行稳定性。
英文资料：
product name
Gasonics 06764-005 Control Board
Product application areas
Main control and collaboration of plasma de gluing/cleaning equipment
Coordinate and control the load-bearing system in Gasonics plasma processing equipment, manage process flow, state machines, and fault interlocks.
Wafer handling and mechanism control
Cooperate with the motor drive and pneumatic module to control the actions of the conveying arm, lifting platform, clamping/releasing, etc., ensuring the timing of loading and unloading and transportation.
Load lock and vacuum interlock control
Handle the logic of load lock prohibition, chamber pressure threshold, pumping and inflation sequence, etc., to ensure the vacuum environment and safety interlock.
Gas path/valve and process medium management
Drive solenoid valves, switch and feedback collection related to mass flow control, to achieve sequential control of gas feed, discharge and purging.
Temperature control and process monitoring interface
Collect heating table and chamber temperature and related sensor signals, and output control quantities to the upper or execution unit for constant temperature and over temperature protection.
RF/Power Subsystem Enabling and Protection
Enable/disable control and status monitoring of RF power supply, bias power supply, etc., and participate in interlock protection for overcurrent, overvoltage, overheating, etc.
I/O aggregation and upper computer communication
As an internal I/O aggregation node of the device, it completes data exchange with the human-machine interface/upper industrial control computer, supports alarm, event, and recipe execution feedback.
Maintenance and replacement upgrade scenarios
Used for spare parts replacement and fault repair of Aura series and other models; As a compatible control board in the renovation of old machines, restore the stability of equipment operation.
2.产 品 展 示
3.其他产品
GE VMIVME-5565-010000 332-015565-010000 P反光内存模块
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