Gasonics A35-302-01双电源模块 PDF资料
1.产 品 资 料 介 绍:
产品名称
Gasonics A35-302-01 双电源模块
产品应用领域
等离子体灰化设备高压供电系统
该模块广泛应用于 Gasonics Aura 系列(如 Aura 3010、L3510、A2000LL 等)等离子灰化设备中,负责为射频电源、加热器、电磁控制单元等提供高压直流电源。可控硅整流与功率转换控制
模块采用 SCR(可控硅)技术,具备大电流、高电压控制能力,用于工业设备内部交流到直流的整流与电源切换控制,保障功率输出稳定性。设备主电源冗余切换保护
具备双电源输入结构,能在主电源失效时自动切换至备用电源,确保等离子体处理过程不中断,提升设备整体运行可靠性。半导体制造系统维护与部件替换
用于老旧设备中作为原厂标准电源模块的更换件,在维护过程中常用于恢复 Gasonics 设备电源功能,延长设备使用寿命。工业自动化高功率应用场景
适用于其他工业控制系统中需要高压、大电流供电的场景,如真空系统、热处理设备、大型电控柜中的电源驱动部分。
英文资料:
product name
Gasonics A35-302-01 Dual Power Module
Product application areas
High voltage power supply system for plasma ashing equipment
This module is widely used in Gasonics Aura series (such as Aura 3010, L3510, A2000LL, etc.) plasma ashing equipment, responsible for providing high-voltage DC power for RF power supply, heater, electromagnetic control unit, etc.
Controllable silicon rectification and power conversion control
The module adopts SCR (silicon controlled rectifier) technology, which has the ability to control high current and high voltage, and is used for rectification and power switching control of AC to DC inside industrial equipment to ensure power output stability.
Equipment main power redundancy switching protection
Equipped with a dual power input structure, it can automatically switch to the backup power supply when the main power supply fails, ensuring uninterrupted plasma processing and improving the overall operational reliability of the equipment.
Maintenance and Component Replacement of Semiconductor Manufacturing Systems
Used as a replacement part for the original factory standard power module in old equipment, it is commonly used during maintenance to restore the power function of Gasonics equipment and extend its service life.
High power application scenarios for industrial automation
Suitable for scenarios in other industrial control systems that require high voltage and high current power supply, such as vacuum systems, heat treatment equipment, and power drive parts in large electrical control cabinets.
2.产 品 展 示
3.其他产品
GE VMIVME-5565-010000 332-015565-010000 P反光内存模块
4.其他英文产品
Eaton XV-440-10TVB-1-50 Touch Screen
FOXBORO FBM217 Voltage Monitor Module
HONEYWELL 05704-A-0146 Digital
R67BENH-R2-NS-NV-00 | CACR-HR20UB-Y9 | 61-0154-22 |
R67BEAH-R2-NS-NV-00 | CACR-PR30BC3AFY134 | 61-0475-14 |
R65HENA-TS-NS-NV-00 | CACR-SR15SB1AFY100 | EPC-27 |
R65HENA-TS-MZ-NV-00 | CACR-PR30BC3CSY166C | 61-0539-10 |
R65HENA-R2-NS-NV-00 | CACR-IR020202FB | 067-02389-0001 |