Gasonics L-3510 486控制主板 PDF资料
1.产 品 资 料 介 绍：
产品名称
Gasonics L-3510 486 控制主板
产品应用领域
半导体等离子灰化设备主控系统
该主板是 Gasonics L-3510 等离子体灰化机的核心控制单元，负责设备启动、运行、监控与各子系统的协调控制。设备内部逻辑与流程控制
通过 Intel 486 架构处理器处理操作流程逻辑，包括反应腔控制、温度监控、气体流量控制、RF 电源管理等。图形用户界面与显示驱动支持
与显示驱动板和接收板配套使用，实现控制面板显示功能，为操作员提供人机交互界面和故障提示信息。晶圆搬运及机械臂控制系统
与气动模块、电机驱动模块配合，控制晶圆在处理腔体中的装载、搬运与卸载，确保工艺流程连贯性。现场设备维修与技术升级替换
用于替代原机老化或故障的主控板，实现旧设备的维修恢复或性能提升，保持系统正常运行。教学与技术研究平台
部分研究机构或教学单位利用退役 Gasonics 设备进行设备运行原理教学与系统控制研究，该主板作为典型工业控制器件具有研究与演示价值。
英文资料：
product name
Gasonics L-3510 486 Control Motherboard
Product application areas
Main control system of semiconductor plasma ashing equipment
This motherboard is the core control unit of Gasonics L-3510 plasma ashing machine, responsible for equipment startup, operation, monitoring, and coordinated control of various subsystems.
Internal logic and process control of equipment
Process operation flow logic through Intel 486 architecture processor, including reaction chamber control, temperature monitoring, gas flow control, RF power management, etc.
Graphic User Interface and Display Driver Support
Used in conjunction with the display driver board and receiver board to achieve the display function of the control panel, providing the operator with a human-machine interaction interface and fault prompt information.
Wafer handling and robotic arm control system
Cooperate with the pneumatic module and motor drive module to control the loading, handling, and unloading of wafers in the processing chamber, ensuring the continuity of the process flow.
On site equipment maintenance and technical upgrade replacement
Used to replace the aging or malfunctioning main control board of the original machine, achieve maintenance, recovery or performance improvement of old equipment, and maintain normal system operation.
Teaching and Technology Research Platform
Some research institutions or teaching units use retired Gasonics equipment for equipment operation principle teaching and system control research. As a typical industrial control device, this motherboard has research and demonstration value.
2.产 品 展 示
3.其他产品
GE VMIVME-5565-010000 332-015565-010000 P反光内存模块
4.其他英文产品
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| R88SENA-R2-NS-NV-03 | SC323A-024 | S32HNBA-RNVM-00 |
| R88HENA-R2-NS-NV-00 | SC403-017-T4 | SC102-001-T3 |
| R88GSNF-TS-M2-NV-04 | SC101-001 | S31GMNA-RNNM-00 |
| R88GENA-R2-NS-NV-00-3 | SC402-023-T4 | SC103-001-T1 |
| R88GENA-R2-NS-NV-00 | SC402-012-T4 | SC103-001-T3 |
| R86HENA-R2-NS-NV-00 | SC323A031 | S32GNNH-RNNM-00 |
