Gasonics 94-2767集线器网络 PDF资料
1.产 品 资 料 介 绍：
产品名称
Gasonics 94-2767 集线器网络模块
产品应用领域
半导体设备控制网络系统
用于 Gasonics 等离子处理设备内部的数据通信网络，将各功能模块（如主控板、电机控制、气动控制等）连接至中央控制系统，进行信号汇总与分发。设备子系统通信管理
支持多个控制子系统（如温控、气压、RF 电源等）之间的数据交互，保障系统内各部分协同运行，是整机系统总线的重要通信中继装置。以太网或串行通信接口转换
模块具备多端口网络连接功能，可作为串口（RS-232/RS-485）或以太网信号的中转节点，实现通信协议的集中管理和设备联网。设备维护与通信诊断
在设备维护过程中，通过该模块可进行模块级网络测试、信号追踪及通信故障排查，是调试工程师常用的接口节点。老旧设备网络升级改造
被广泛用于 Aura 2000/3010 等系列机型的网络接口替换或通信模块升级改造，提高通信稳定性与数据吞吐能力。
英文资料：
product name
Gasonics 94-2767 Hub Network Module
Product application areas
Semiconductor Equipment Control Network System
Used for the internal data communication network of Gasonics plasma processing equipment, connecting various functional modules (such as the main control board, motor control, pneumatic control, etc.) to the central control system for signal aggregation and distribution.
Equipment subsystem communication management
Supporting data exchange between multiple control subsystems (such as temperature control, air pressure, RF power supply, etc.) to ensure the coordinated operation of various parts within the system, it is an important communication relay device for the overall system bus.
Ethernet or serial communication interface conversion
The module has a multi port network connection function and can serve as a relay node for serial ports (RS-232/RS-485) or Ethernet signals, enabling centralized management of communication protocols and device networking.
Equipment maintenance and communication diagnosis
During equipment maintenance, this module can be used for module level network testing, signal tracking, and communication troubleshooting. It is a commonly used interface node for debugging engineers.
Upgrading and renovating old equipment networks
Widely used for network interface replacement or communication module upgrade of Aura 2000/3010 and other series models, improving communication stability and data throughput capability.
2.产 品 展 示
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