Gasonics 855-2423气动控制器模块 PDF资料
1.产 品 资 料 介 绍：
产品名称
Gasonics 855-2423 气动控制器模块
产品应用领域
半导体设备晶圆搬运系统
模块主要用于 Gasonics 等离子灰化或蚀刻设备中的晶圆搬运机械臂，控制其气动执行动作，如抓取、释放、伸缩和旋转。气动阀门控制系统
应用于等离子设备真空腔体中的气动阀门管理，控制进气、排气、抽真空等流程中的关键阀体开合动作。自动上下片系统
用于控制自动化上下料机构的气动缸体驱动，实现晶圆在处理腔体与载片系统之间的安全高效移动。Gasonics Aura 系列设备维护替换
是 Aura 2000、Aura 3010 等系列中专用的控制模块之一，广泛应用于设备维保、更换与旧机翻新项目中。实验设备与改装系统控制模块
一些研究机构或技术实验平台使用该模块进行气动控制实验，或将其集成进自主设计的晶圆处理测试设备中。
英文资料：
product name
Gasonics 855-2423 Pneumatic Controller Module
Product application areas
Semiconductor equipment wafer handling system
The module is mainly used for wafer handling robotic arms in Gasonics plasma ashing or etching equipment, controlling their pneumatic execution actions such as grasping, releasing, stretching, and rotating.
Pneumatic valve control system
Pneumatic valve management applied to plasma equipment vacuum chambers, controlling key valve opening and closing actions in processes such as intake, exhaust, and vacuum extraction.
Automatic loading and unloading system
Pneumatic cylinder drive used to control the automated loading and unloading mechanism, achieving safe and efficient movement of wafers between the processing chamber and the wafer loading system.
Gasonics Aura series equipment maintenance and replacement
It is one of the specialized control modules in the Aura 2000, Aura 3010 and other series, widely used in equipment maintenance, replacement and old machine refurbishment projects.
Experimental equipment and modification system control module
Some research institutions or technology experimental platforms use this module for pneumatic control experiments, or integrate it into self-designed wafer processing testing equipment.
2.产 品 展 示
3.其他产品
4.其他英文产品
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FOXBORO RH926GH Control Input Card
Fanuc A06B-6115-H006 servo drive
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