Gasonics 810-2850-001电机驱动器模块 PDF资料 

1.产 品 资 料 介 绍：

产品名称

Gasonics 810-2850-001 电机驱动器模块

产品应用领域

1. 半导体制造设备
   该模块主要用于Gasonics品牌的等离子体灰化机（Plasma Asher）和蚀刻设备中，驱动真空腔体内的运动控制机构，如载片臂、旋转平台、电动阀门等部件。

2. 光刻工艺中的晶圆处理系统
   在光刻前后的晶圆清洗、去胶工艺中，此驱动器模块可控制与旋转、升降相关的电机动作，确保晶圆传输的精准与稳定性。

3. 真空系统与传送设备
   用于控制与真空腔体接口的自动门、电动推杆和抽气装置中伺服或步进电机，提升自动化程度，配合Gasonics气动或电动阀门模块运作。

4. 等离子处理设备中的运动控制
   在等离子蚀刻或去胶过程中，此驱动器用于控制电机执行如托盘旋转、负载锁机构启闭、样品上下移动等精密操作。

5. 旧型号设备维护与替换应用
   广泛用于对Gasonics Aura 2000、Aura 3010、L3510等型号的设备进行维修、更换与升级，是原厂电机驱动系统的兼容件。

6. 实验室级定制设备与教育用途
   某些高校或研究机构在使用退役半导体设备进行教学或试验时，保留该模块作为教学范例或运动控制单元。

英文资料：

product name

Gasonics 810-2850-001 Motor Driver Module

Product application areas

Semiconductor Manufacturing Equipment

This module is mainly used in Gasonics' plasma asher and etching equipment to drive the motion control mechanism inside the vacuum chamber, such as the wafer arm, rotating platform, electric valve, and other components.

Wafer processing system in photolithography process

In the wafer cleaning and photoresist removal processes before and after photolithography, this driver module can control the motor actions related to rotation and lifting, ensuring the precision and stability of wafer transfer.

Vacuum system and conveying equipment

Used to control the servo or stepper motors in automatic doors, electric push rods, and exhaust devices that interface with vacuum chambers, to enhance automation and operate in conjunction with Gasonics pneumatic or electric valve modules.

Motion Control in Plasma Processing Equipment

During plasma etching or de gluing processes, this driver is used to control the motor to perform precise operations such as tray rotation, load lock mechanism opening and closing, and sample up and down movement.

Application of maintenance and replacement of old model equipment

Widely used for repairing, replacing, and upgrading equipment of Gasonics Aura 2000, Aura 3010, L3510, and other models, it is a compatible component of the original motor drive system.

Laboratory grade customized equipment and educational purposes

Some universities or research institutions retain this module as a teaching example or motion control unit when using retired semiconductor equipment for teaching or experimentation.

2.产      品      展      示      

3.其他产品

ABB GFD563A102 励磁系统

ASEA SNAT-7902逆变器

ASEA AE-6003脉冲发生器

4.其他英文产品

GE 151X1235DB15SA01 power converter

GE IS200TRLYH1B power converter

ASEA DSQC108 controller backplane

本篇文章出自瑞昌明盛自动化设备有限公司官网，转载请附上此链接:http://www.jiangxidcs

品牌：Gasonics

型号：810-2850-001电机驱动器模块

质保：一年

成色：全新/二手

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特点：主营产品各种模块/卡件，控制器，触摸屏，伺服驱动器。

应用行业：广泛应用于冶金、石油天然气、玻璃制造业、铝业、石油化工、煤矿、造纸印刷、纺织印染、机械、电子制造、汽车制造、烟草、塑胶机械、电力、水利、水处理/环保、市政工程、锅炉供暖、能源、输配电等

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