Gasonics 90-2608加载锁接口板 PDF资料
1.产 品 资 料 介 绍：
产品名称：Gasonics 90-2608 加载锁接口板
部件类型：加载锁控制接口电路板（Loadlock Control Interface PCB）
主要功能：用于 Gasonics 等离子设备中，实现加载锁（Loadlock）区域与主控制系统之间的信号接口与逻辑控制，保障工艺腔体进出料流程的自动化与安全性。
一、加载锁区域功能概述
加载锁（Loadlock）是半导体设备中用于晶圆在大气环境与真空工艺腔之间转移的过渡区域。90-2608 接口板是该区域的关键控制部件之一。
典型任务：
控制真空泵启动/停止
监控真空压力状态信号
驱动门控气缸/电磁阀动作
与主系统通讯并报告状态（如“Ready”、“Busy”、“Error”）
二、信号接口与通信
该接口板连接主控系统与加载锁执行部件（如传感器、阀门、泵），负责信号转换与逻辑中继。
接口支持内容：
数字输入/输出（如门开关状态、真空确认）
模拟输入（如真空传感器反馈）
控制输出（驱动真空阀、空气阀、门锁）
可能集成RS-232/TTL通信接口（用于状态同步）
英文资料：
Product Name: Gasonics 90-2608 Loading Lock Interface Board
Component type: Loadlock Control Interface PCB
Main function: Used in Gasonics plasma equipment to achieve signal interface and logic control between the Loadlock area and the main control system, ensuring the automation and safety of the process chamber feeding and discharging process.
1、 Overview of loading lock area function
Loadlock is a transitional area used in semiconductor devices for transferring wafers between atmospheric environments and vacuum process chambers. The 90-2608 interface board is one of the key control components in this area.
Typical tasks:
Control the start/stop of the vacuum pump
Monitor the vacuum pressure status signal
Drive door control cylinder/solenoid valve action
Communicate with the main system and report status (such as "Ready", "Busy", "Error")
2、 Signal interface and communication
This interface board connects the main control system with the load lock execution components (such as sensors, valves, pumps) and is responsible for signal conversion and logic relay.
Interface support content:
Digital input/output (such as door switch status, vacuum confirmation)
Analog input (such as vacuum sensor feedback)
Control output (driving vacuum valve, air valve, door lock)
Possible integration of RS-232/TTL communication interface (for status synchronization)
2.产 品 展 示
3.其他产品
4.其他英文产品
ASEA YM316001-NL Double Plate Component
Foxboro FBM230 Communication Module
Fanuc A06B-6114-H205 servo amplifier
| SR3644-4963-7-1 | AMAT 0100-94053 | 57350886 DSIM 2918 ABB |
| SR3642-4982-7-56BC-CU | AMAT 0100-71220 | PFCL 201C-50.0KN |
| SR3642-4982-7-10-56BC | AMAT 0100-90025 | 57310001-T DSPB120 ABB |
| SR3642-4822-84-7-56HC-CU | AMAT 0100-20070 | 26390410-CV ABB |
| SR3642-4822-84-7-48C-CU | SE10000-000000 | PFBL141B/C |
