Gasonics SS-BNV51-VCR4C气门隔离 PDF资料
1.产 品 资 料 介 绍：
产品名称：Gasonics SS-BNV51-VCR4C 气门隔离组件
部件类型：高真空级不锈钢气体隔离阀（Stainless Steel Gas Isolation Valve）
主要功能：用于 Gasonics 等离子设备中实现高纯气体路径的隔离、切换与保护，防止交叉污染并确保工艺腔体气密完整性。
一、气体路径隔离与控制
该气门隔离阀用于控制高纯气体（如 O₂、N₂、Ar 等）在工艺腔体与气路系统之间的流通与截止，是气体输送系统中的关键安全元件。
典型应用场景：
工艺前对气体路径进行排气/吹扫
工艺中实现高精度气体切换
工艺后防止残留气体倒流污染
二、结构与接口
阀体材质：不锈钢（适用于高纯度、高腐蚀性气体环境）
连接方式：VCR 4C 接头（Swagelok VCR 接口，适合真空密封）
控制方式：通常为气动驱动（可连接至控制器模块）
密封类型：金属对金属密封或 PTFE 垫圈，根据工艺定制
三、气路模块配合使用
该隔离阀通常安装于气体分配模块（GDM）或 MFC 前端，与下列模块协同工作：
质量流量控制器（MFC）
快速切换阀组
泄压阀、止回阀等安全组件
工艺腔体进气口
英文资料：
Product Name: Gasonics SS-BNV51-VCR4C Valve Isolation Component
Component type: Stainless Steel Gas Isolation Valve with high vacuum grade
Main function: Used for isolating, switching, and protecting high-purity gas paths in Gasonics plasma equipment, preventing cross contamination, and ensuring the airtightness and integrity of the process chamber.
1、 Gas path isolation and control
This valve isolation valve is used to control the flow and cutoff of high-purity gases (such as O ₂, N ₂, Ar, etc.) between the process chamber and the gas system, and is a critical safety component in gas delivery systems.
Typical application scenarios:
Exhaust/blow off the gas path before the process
Realize high-precision gas switching in the process
Prevent residual gas backflow and pollution after the process
2、 Structure and Interface
Valve body material: stainless steel (suitable for high-purity and highly corrosive gas environments)
Connection method: VCR 4C connector (Swagelok VCR interface, suitable for vacuum sealing)
Control mode: usually pneumatic drive (can be connected to the controller module)
Sealing type: metal to metal seal or PTFE gasket, customized according to the process
3、 Used in conjunction with pneumatic modules
This isolation valve is usually installed at the front end of the Gas Distribution Module (GDM) or MFC, and works in conjunction with the following modules:
Mass Flow Controller (MFC)
Quick switching valve group
Safety components such as pressure relief valves and check valves
Process chamber air inlet
2.产 品 展 示
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