Gasonics 96-1061 A控制主板 PDF资料
1.产 品 资 料 介 绍：
产品名称：Gasonics 96-1061 A 控制主板
部件类型：中央控制主板（Main Controller Board）
主要功能：作为 Gasonics 等离子设备的主控制核心，负责管理整个系统的工艺流程、子系统协调、状态监控、用户交互及通信指令处理。
一、系统中央处理核心
96-1061 A 控制主板集成处理器、内存、通信控制器等模块，承担整台设备的运行管理职责，是设备运行的“大脑”。
主要任务包括：
执行工艺程序与序列控制
管理射频系统、气体流量、升降机构等子系统
接收用户输入并驱动输出显示
与外部设备进行数据通信（如串口/总线）
二、多模块信号协调
该主板与多个下级模块（如解码器、气控模块、电源驱动板）保持通信，并发送控制逻辑或采集反馈信息。
典型连接模块：
控制接口板（如 A95-108-02）
电源模块（如 MAP130-4000）
解码模块（如 A90-014-01）
手臂/升降驱动控制板（如 885-2423）
三、工艺流程与互锁管理
控制主板集成多级联锁逻辑，可确保设备在安全状态下执行关键操作，对温度、压力、真空、电流等关键参数进行实时监控。
典型安全功能：
高压联锁/真空互锁判断
工艺时间/温度逻辑控制
系统报警与自动停机
英文资料：
Product Name: Gasonics 96-1061 A Control Motherboard
Component type: Main Controller Board
Main function: As the main control core of Gasonics plasma equipment, responsible for managing the entire system's process flow, subsystem coordination, status monitoring, user interaction, and communication instruction processing.
1、 Central processing core of the system
The 96-1061A control motherboard integrates modules such as processors, memory, and communication controllers, and is responsible for the operation and management of the entire device. It is the "brain" of device operation.
The main tasks include:
Execute process procedures and sequence control
Manage subsystems such as RF system, gas flow, lifting mechanism, etc
Receive user input and drive output display
Communicate data with external devices (such as serial/bus)
2、 Multi module signal coordination
This motherboard maintains communication with multiple subordinate modules (such as decoders, pneumatic modules, power driver boards) and sends control logic or collects feedback information.
Typical connection module:
Control interface board (such as A95-108-02)
Power module (such as MAP130-4000)
Decoding module (such as A90-014-01)
Arm/lift drive control board (such as 885-2423)
3、 Process flow and interlock management
The control motherboard integrates multi-level interlocking logic to ensure that the equipment performs critical operations in a safe state and monitors key parameters such as temperature, pressure, vacuum, and current in real-time.
Typical security features:
High voltage interlock/vacuum interlock judgment
Process time/temperature logic control
System alarm and automatic shutdown
2.产 品 展 示
3.其他产品
4.其他英文产品
Siemens 6ES7307-1EA01-0AA0 power module
Bentley 330980-50-05 proximity sensor
| SRF3752-4984-84-5-56BC-CU | SC402-001-T2 | SC753B-001-02 |
| SRF3736-4983-84-7-56HC-CU | SC403-013-T3 | SC755A-001-01 |
| SRF3736-4983-84-5-56BC-CU | SC403-001-T5 | SC754A-001-02 |
| SRF3650-4823-84-5-56BC-CU | SC402-003-T3 | SC903NN-001-01 |
| SRF3643-4593-7-56C | SC403-001-T2 | SC755A-040-08 |
| SRF3643-4593-7-5-56C | SC403-002-T2 | SC754B-001-01 |
