Gasonics A90-2565控制器模块 PDF资料
1.产 品 资 料 介 绍：
产品名称：Gasonics A90-2565 控制器模块
部件类型：系统控制模块（System Controller Module）
主要功能：用于 Gasonics 等离子处理设备中，作为核心控制单元之一，负责管理工艺参数、协调子系统运行、执行逻辑控制和状态监测等任务。
一、工艺流程控制核心
A90-2565 模块是设备的工艺控制中枢之一，接收上位系统指令，协调等离子发生器、真空系统、气体模块、温控单元等子系统。
典型任务包括：
控制射频电源开启/关闭及功率设定
管理气体流量、阀门状态与MFC指令
执行升降平台或传输机械动作指令
跟踪并记录工艺步骤、阶段计时
二、信号采集与响应
该控制模块具有多通道输入输出能力，可实时采集设备运行状态，并驱动各类执行元件。
支持的信号类型：
数字/模拟输入（传感器信号、温度、电压等）
控制输出（电源控制、继电器驱动、信号灯等）
与上位机通信（通常为串口或定制总线）
三、设备安全与互锁保护
A90-2565 还承担关键安全联锁逻辑的判断，确保设备在安全状态下运行，并在异常时快速切断相关控制回路。
示例互锁应用：
真空不足时禁止开启等离子体
腔体门未锁闭禁止启动工艺
温度超限时切断射频电源输出
英文资料：
Product Name: Gasonics A90-2565 Controller Module
Component type: System Controller Module
Main function: Used in Gasonics plasma processing equipment as one of the core control units, responsible for managing process parameters, coordinating subsystem operation, executing logic control, and status monitoring tasks.
1、 Core of Process Control
The A90-2565 module is one of the process control centers of the equipment, which receives instructions from the upper system and coordinates subsystems such as the plasma generator, vacuum system, gas module, and temperature control unit.
Typical tasks include:
Control RF power on/off and power setting
Manage gas flow, valve status, and MFC commands
Execute lifting platform or transmit mechanical action instructions
Track and record process steps and stage timing
2、 Signal acquisition and response
This control module has multi-channel input and output capabilities, which can collect real-time device operating status and drive various execution components.
Supported signal types:
Digital/analog inputs (sensor signals, temperature, voltage, etc.)
Control output (power control, relay drive, signal lights, etc.)
Communicate with the upper computer (usually a serial port or customized bus)
3、 Equipment safety and interlock protection
A90-2565 also undertakes the judgment of critical safety interlock logic, ensuring that the equipment operates in a safe state and quickly cuts off relevant control circuits in case of abnormalities.
Example interlock application:
Do not turn on plasma when vacuum is insufficient
Failure to lock the chamber door prohibits starting the process
Cut off the RF power output when the temperature exceeds the limit
2.产 品 展 示
3.其他产品
IS410SRLYS2A IS400SRLYS2ABB端子板模块
4.其他英文产品
KJ3222X1-BA1 Analog Input Module
Siemens 6ES7307-1EA01-0AA0 power module
| STF3648-5268-61-56BC | SC403-027-T3 | SC905-034-01 |
| STF3640-4977-61-56BC | SC403-014 | SC933-001-NN-01 |
| STF3624-5604-61-56C | SC402-024-T2 | SC933-001-01 |
| STF3624-4976-61-56BC | SC403-013-T2 | SC753A-040-08 |
| STC3720-4085-56C | SC403-013-T4 | SC90200101NNN |
