Gasonics 06764002控制器板 PDF资料
1.产 品 资 料 介 绍：
产品名称：Gasonics 06764002 控制器板
部件类型：控制器电路板（Controller PCB）
主要功能：用于 Gasonics 等离子设备中，承担关键子系统（如气体、射频、电源、机械等）的控制逻辑执行与信号协调，实现自动化工艺过程的子系统智能控制
一、核心控制与信号处理
该控制板接收主控系统下发的命令，执行对应的控制任务，如开关执行器、调整参数、采集状态并反馈。
常见控制功能：
控制电磁阀、马达、传感器等设备运行
管理子系统的流程逻辑（如气体切换或腔体操作）
采集模拟/数字信号并上传状态
二、模块化信号接口设计
06764002 控制板设计支持多路 I/O 接口，适配现场设备各种信号输入与输出需求，支持热插拔连接，便于维护和系统集成。
接口支持类型：
数字量输入/输出（DI/DO）
模拟量输入（AI）或反馈信号
TTL 或专用通信信号（与主控系统联通）
三、与上位系统集成
此控制板通常作为中间控制层，处于上位主控板（如 ABX 或 Aura 控制器）与下层执行器之间，起到逻辑中继与信号协调作用。
系统层级结构：
主控板 → 06764002 控制器板 → 执行部件（电磁阀、传感器等）
英文资料：
Product Name: Gasonics 06764002 Controller Board
Component type: Controller PCB
Main function: Used in Gasonics plasma equipment to undertake the control logic execution and signal coordination of key subsystems (such as gas, RF, power, machinery, etc.), achieving intelligent control of subsystems in automated process
1、 Core Control and Signal Processing
This control board receives commands issued by the main control system and executes corresponding control tasks, such as switching actuators, adjusting parameters, collecting status, and providing feedback.
Common control functions:
Control the operation of equipment such as solenoid valves, motors, sensors, etc
Process logic of management subsystem (such as gas switching or chamber operation)
Collect analog/digital signals and upload status
2、 Modular signal interface design
The 06764002 control board is designed to support multiple I/O interfaces, adapt to various signal input and output requirements of field devices, support hot swappable connections, and facilitate maintenance and system integration.
Interface support types:
Digital Input/Output (DI/DO)
Analog input (AI) or feedback signal
TTL or dedicated communication signal (connected to the main control system)
3、 Integration with the upper system
This control board is usually used as an intermediate control layer, located between the upper main control board (such as ABX or Aura controller) and the lower level actuators, playing a role in logical relay and signal coordination.
System hierarchical structure:
Main control board → 06764002 controller board → execution components (solenoid valves, sensors, etc.)
2.产 品 展 示
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| T21NRHJ-LNN-NS-00 | 6SC6100-0GA12 | 3500/32M 149986-02 |
