Gasonics 02423-001控制板 PDF资料
1.产 品 资 料 介 绍:
产品名称:Gasonics 02423-001 控制板
部件类型:设备子系统控制板(Subsystem Control PCB)
主要功能:作为等离子设备子系统(如气体流控、射频电源、温控系统等)的控制核心,接收主控命令、协调硬件运行,并提供状态反馈
一、子系统控制与执行
02423-001 控制板通常用于 Gasonics 等离子设备中的某一特定子模块(如升降平台、气路系统、电源分配等),实现局部控制功能。
典型功能示例:
接收主控系统指令并进行逻辑处理
控制电机、阀门、传感器等部件动作
采集子系统运行状态并返回至主控板
二、输入输出信号接口
该控制板支持多种 I/O 接口,连接外部执行器与传感器,完成设备内部状态识别和动作响应。
常见信号类型:
数字输入/输出(如开关信号、状态指示)
模拟输入(如温度、电压监测)
控制输出(如驱动信号、电源开关)
三、系统集成应用
该模块通常通过主板(如 ABX-88919 系列)统一调度,作为控制系统的一部分,执行分布式控制任务。
配合使用模块:
电源模块(如 MAP130-4000)
驱动模块(如 RD-323M10)
显示与解码模块(如 A90-014-01)
英文资料:
Product Name: Gasonics 02423-001 Control Board
Component type: Subsystem Control PCB
Main function: As the control core of plasma equipment subsystems (such as gas flow control, RF power supply, temperature control system, etc.), it receives main control commands, coordinates hardware operation, and provides status feedback
1、 Subsystem Control and Execution
The 02423-001 control board is typically used for a specific submodule in Gasonics plasma equipment (such as lifting platforms, gas systems, power distribution, etc.) to achieve local control functions.
Typical functional examples:
Receive instructions from the main control system and perform logical processing
Control the actions of components such as motors, valves, sensors, etc
Collect the operating status of the subsystem and return it to the main control board
2、 Input/output signal interface
This control board supports multiple I/O interfaces, connects external actuators and sensors, and completes internal device state recognition and action response.
Common signal types:
Digital input/output (such as switch signals, status indicators)
Analog inputs (such as temperature and voltage monitoring)
Control outputs (such as drive signals, power switches)
3、 System integration application
This module is usually scheduled uniformly through the motherboard (such as ABX-88919 series) as part of the control system to perform distributed control tasks.
Collaborative use of modules:
Power module (such as MAP130-4000)
Driver module (such as RD-323M10)
Display and decoding module (such as A90-014-01)
2.产 品 展 示
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IS410SRLYS2A IS400SRLYS2ABB端子板模块
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AMAT 0190-66253 Communication Module
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