Gasonics 06764802控制器模块 PDF资料
1.产 品 资 料 介 绍：
产品名称：Gasonics 06764802 控制器模块
部件类型：多功能控制器 / 控制模块（Multifunctional Controller Module）
主要功能：用于控制、协调和监测 Gasonics 等离子设备各子系统的运行状态，作为核心控制部件之一，管理执行器、传感器和通信接口的信号流转与逻辑控制
一、工艺流程控制核心
06764802 控制器模块负责关键工艺控制逻辑的执行，协调气体供应、射频电源、真空系统及运动部件的有序运行。
典型功能：
控制气体流量与配比（与 MFC 协同）
射频功率启动/停止控制（配合 RF 电源模块）
真空腔体阀门与压力反馈控制
工艺运行状态管理与步骤切换
二、系统集成与信号管理
该控制器模块连接多个子系统模块（I/O 板、显示模块、报警系统等），对输入/输出信号进行汇总与指令分发，是设备的信号处理与指令中心。
接口类型：
多通道数字输入/输出（DI/DO）
模拟信号通道（AI/AO）
通信协议接口（可能包括串口或定制通信协议）
三、安全与互锁控制
控制器内含多级联锁保护逻辑，确保设备运行中的安全性，例如未抽真空时不允许启动 RF 电源或开门等操作。
安全功能举例：
负载锁门状态检测
工艺腔压力互锁
温控或电源故障锁定运行
英文资料：
Product Name: Gasonics 06764802 Controller Module
Component type: Multifunctional Controller Module
Main function: Used to control, coordinate, and monitor the operating status of various subsystems of Gasonics plasma equipment. As one of the core control components, it manages the signal flow and logic control of actuators, sensors, and communication interfaces
1、 Core of Process Control
The 06764802 controller module is responsible for executing key process control logic, coordinating the orderly operation of gas supply, RF power supply, vacuum system, and moving parts.
Typical functions:
Control gas flow rate and ratio (in collaboration with MFC)
RF power start/stop control (in conjunction with RF power module)
Vacuum chamber valve and pressure feedback control
Process operation status management and step switching
2、 System Integration and Signal Management
This controller module connects multiple subsystem modules (I/O board, display module, alarm system, etc.), summarizes and distributes input/output signals, and is the signal processing and command center of the device.
Interface type:
Multi channel digital input/output (DI/DO)
Analog Signal Channel (AI/AO)
Communication protocol interface (may include serial port or customized communication protocol)
3、 Security and interlock control
The controller contains multi-level interlocking protection logic to ensure the safety of equipment operation, such as not allowing RF power to be started or opening doors when vacuum is not applied.
Examples of security functions:
Load lock door status detection
Process chamber pressure interlock
Temperature control or power failure locking operation
2.产 品 展 示
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