Gasonics 310-2301同轴电缆 PDF资料
1.产 品 资 料 介 绍：
产品名称：Gasonics 310-2301 同轴电缆
部件类型：射频同轴连接电缆（RF Coaxial Cable）
主要功能：用于传输高频射频信号，连接等离子设备中的射频电源模块与匹配网络、腔体或监测设备，保证信号完整性与稳定性
一、射频信号传输介质
310-2301 同轴电缆专为等离子射频系统设计，具备低衰减、高屏蔽性能，确保 13.56 MHz 等工业射频信号高效传输。
关键特性：
低插入损耗
良好电磁屏蔽，防止外部干扰
高耐压与耐温性能，适应工业环境
二、设备射频连接关键部件
该同轴电缆主要连接 Gasonics 等离子射频电源（如 AWD-D 系列）与射频匹配网络、工艺腔体或射频传感器，实现功率传输和信号反馈。
应用连接示例：
射频功率模块至匹配器接口
匹配器至工艺腔体耦合端
射频监测装置输入线
三、工业环境适用性
310-2301 设计满足半导体制造环境对清洁度、电气性能和机械可靠性的严格要求。
耐用性特点：
抗振动和弯折，延长使用寿命
防腐蚀外护套，适合洁净室应用
优异的绝缘性能保证安全稳定运行
英文资料：
Product Name: Gasonics 310-2301 Coaxial Cable
Component type: RF Coaxial Cable
Main function: Used for transmitting high-frequency RF signals, connecting RF power modules in plasma equipment with matching networks, chambers, or monitoring devices to ensure signal integrity and stability
1、 RF signal transmission medium
310-2301 coaxial cable is designed specifically for plasma RF systems, with low attenuation and high shielding performance, ensuring efficient transmission of industrial RF signals such as 13.56 MHz.
Key features:
LOW INSERTION LOSS
Good electromagnetic shielding to prevent external interference
High pressure resistance and temperature resistance, suitable for industrial environments
2、 Key components of device RF connection
This coaxial cable mainly connects Gasonics plasma RF power supplies (such as AWD-D series) with RF matching networks, process chambers, or RF sensors to achieve power transmission and signal feedback.
Application Connection Example:
RF power module to adapter interface
Matcher to process chamber coupling end
RF monitoring device input line
3、 Applicability to industrial environment
The 310-2301 design meets the strict requirements of cleanliness, electrical performance, and mechanical reliability in the semiconductor manufacturing environment.
Durability characteristics:
Anti vibration and bending, extending service life
Anti corrosion outer sheath, suitable for cleanroom applications
Excellent insulation performance ensures safe and stable operation
2.产 品 展 示
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