Gasonics 12N-010-13机械化面板 PDF资料
1.产 品 资 料 介 绍：
产品名称：Gasonics 12N-010-13 机械化面板
部件类型：机械控制操作面板（Mechanical Control Panel）
主要功能：作为设备的人机交互界面，提供物理按钮、开关和指示灯，实现对等离子设备机械部分的控制与状态反馈
一、机械操作与控制界面
该机械化面板广泛应用于 Gasonics 等离子清洗和灰化设备中，主要用于控制机械动作如升降平台、负载锁门、真空阀门等。
典型功能：
启动和停止机械动作（如升降板上下移动）
门锁开闭控制
急停按钮与安全联锁指示
状态指示灯反馈机械位置和运行状态
二、设备机械子系统控制
12N-010-13 面板与主控逻辑板及驱动模块配合，直接控制机械执行元件，保证工艺流程中的机械部分准确响应。
控制对象：
负载锁机械门及升降机构
真空腔体阀门机械驱动
机械联锁与安全保护系统
三、维护与操作便利性
该机械面板设计符合工业标准，操作简便且耐用，便于现场技术人员进行设备操作和维护。
维护要点：
定期检查按钮和开关的灵敏度和触点状况
确保指示灯显示正常，线路连接牢固
确认急停及安全联锁功能有效
英文资料：
Product Name: Gasonics 12N-010-13 Mechanized Panel
Component type: Mechanical Control Panel
Main function: As the human-machine interaction interface of the device, it provides physical buttons, switches, and indicator lights to achieve control and status feedback of the mechanical part of the plasma equipment
1、 Mechanical operation and control interface
This mechanized panel is widely used in Gasonics plasma cleaning and ashing equipment, mainly for controlling mechanical actions such as lifting platforms, load locking doors, vacuum valves, etc.
Typical functions:
Start and stop mechanical actions (such as the up and down movement of the lifting plate)
Door lock opening and closing control
Emergency stop button and safety interlock indication
The status indicator light provides feedback on the mechanical position and operating status
2、 Equipment mechanical subsystem control
The 12N-010-13 panel, in conjunction with the main control logic board and driver module, directly controls the mechanical execution components to ensure accurate response of the mechanical parts in the process flow.
Control object:
Load lock mechanical door and lifting mechanism
Mechanical drive of vacuum chamber valve
Mechanical Interlocking and Safety Protection System
3、 Maintenance and operational convenience
The mechanical panel design complies with industrial standards, is easy to operate and durable, and is convenient for on-site technicians to operate and maintain the equipment.
Maintenance points:
Regularly check the sensitivity and contact condition of buttons and switches
Ensure that the indicator light displays normally and the wiring is securely connected
Confirm that the emergency stop and safety interlock functions are effective
2.产 品 展 示
3.其他产品
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