Gasonics ABX-88919-41-1控制板 PDF资料
1.产 品 资 料 介 绍：
产品名称：Gasonics ABX-88919-41-1 控制板
部件类型：主控制板 / 逻辑控制模块（Main Control Board / Logic Controller）
主要功能：负责 Gasonics 等离子设备的整体控制逻辑，包括工艺参数管理、信号处理、设备状态监控及执行指令发出
一、设备核心控制单元
该控制板作为设备的“大脑”，整合来自操作面板、传感器、执行器的信号，实现工艺流程自动化。
典型功能：
处理工艺参数设定及实时调整
控制射频电源、气体流量、真空系统等子模块
监控安全联锁状态及故障报警
与上位机或制造执行系统（MES）通信
二、信号接口与数据处理
ABX-88919-41-1 控制板集成多种数字、模拟输入输出接口，负责信号转换与逻辑运算。
接口类型：
数字输入/输出（DI/DO）
模拟量输入/输出（AI/AO）
通讯接口（如 RS-232/RS-485、CAN 等，视具体设备而定）
继电器驱动输出
三、工艺流程自动化执行
控制板协调各子系统动作，确保等离子工艺按预定程序精准运行。
控制对象：
射频电源模块（如 AWD-D-1-0-023-010）
气体流量控制器（MFC）
真空泵及阀门控制
机械运动部件（升降板、负载锁门）
英文资料：
Product Name: Gasonics ABX-88919-41 Control Board
Component type: Main Control Board/Logic Controller
Main function: Responsible for the overall control logic of Gasonics plasma equipment, including process parameter management, signal processing, equipment status monitoring, and issuing execution instructions
1、 Equipment core control unit
This control board serves as the "brain" of the device, integrating signals from the operation panel, sensors, and actuators to achieve process automation.
Typical functions:
Process parameter setting and real-time adjustment
Control sub modules such as RF power supply, gas flow rate, vacuum system, etc
Monitor the safety interlock status and fault alarms
Communicate with the upper computer or Manufacturing Execution System (MES)
2、 Signal interface and data processing
The ABX-88919-41 control board integrates multiple digital and analog input/output interfaces, responsible for signal conversion and logic operations.
Interface type:
Digital Input/Output (DI/DO)
Analog Input/Output (AI/AO)
Communication interfaces (such as RS-232/RS-485, CAN, etc., depending on the specific device)
Relay driven output
3、 Automated execution of process flow
The control board coordinates the actions of various subsystems to ensure that the plasma process operates accurately according to the predetermined program.
Control object:
RF power module (such as AWD-D-1-0-023-010)
Gas flow controller (MFC)
Vacuum pump and valve control
Mechanical moving parts (lifting plate, load lock door)
2.产 品 展 示
3.其他产品
KOLLMORGEN S70602-PBNANA 伺服驱动控制器
4.其他英文产品
Kollmorgen MMC-SD-0.5-230-D servo drive
REXROTH PPC-R22.1N-T-NN-P1-NN-FW servo
DELTA TAU ACC-24E2 interface simulation
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