Gasonics 17547-01控制组件 PDF资料
1.产 品 资 料 介 绍：
产品名称：Gasonics 17547-01 控制组件
部件类型：集成式设备控制模块（Control Assembly Module）
主要功能：承担 Gasonics 等离子清洗设备中的部分核心控制任务，如处理流程管理、信号分发、执行器驱动与状态监控等
一、等离子清洗设备的工艺控制单元
该控制组件广泛应用于 Gasonics Aura、L3510、AE 系列等等离子灰化设备中，作为流程控制系统中的关键模块。
典型用途：
控制等离子处理时间、气体通断、功率调节等工艺参数
接收来自主机或操作面板的控制命令
对下游执行器（电磁阀、升降平台、RF 电源）发送控制信号
二、信号集成与接口转换模块
17547-01 控制组件在系统中常作为多个子系统之间的信号桥梁，负责不同信号标准（模拟、数字、TTL）的整合与分配。
适用场景：
将传感器/编码器信号转为控制指令
实现 PLC 与机械子系统之间的数据同步
接入设备诊断与故障保护回路（如 interlock 系统）
三、执行器驱动与反馈逻辑处理
该组件集成有用于驱动步进电机、继电器、气动元件等装置的控制逻辑，并对其反馈状态进行实时监控和判断。
控制对象可能包括：
负载锁升降板（如 A90-029-03）
步进驱动器（如 RD-323M10）
腔体门阀、气体流量控制器（MFC）
冷却水/温控回路启动继电器
英文资料：
Product Name: Gasonics 17547-01 Control Component
Component type: Integrated Control Assembly Module
Main function: Undertake some core control tasks in Gasonics plasma cleaning equipment, such as process management, signal distribution, actuator driving, and status monitoring
1、 Process control unit of plasma cleaning equipment
This control component is widely used in plasma ashing equipment such as Gasonics Aura, L3510, AE series, etc., as a key module in the process control system.
Typical use:
Control process parameters such as plasma processing time, gas on/off, power regulation, etc
Receive control commands from the host or operation panel
Send control signals to downstream actuators (solenoid valves, lifting platforms, RF power supplies)
2、 Signal integration and interface conversion module
The 17547-01 control component is often used as a signal bridge between multiple subsystems in a system, responsible for integrating and distributing different signal standards (analog, digital, TTL).
Applicable scenarios:
Convert sensor/encoder signals into control commands
Realize data synchronization between PLC and mechanical subsystem
Connect device diagnosis and fault protection circuit (such as interlock system)
3、 Actuator driver and feedback logic processing
This component integrates control logic for driving stepper motors, relays, pneumatic components, and other devices, and monitors and judges their feedback status in real time.
The controlled objects may include:
Load lock lifting plate (such as A90-029-03)
Stepper driver (such as RD-323M10)
Chamber gate valve, gas flow controller (MFC)
Cooling water/temperature control circuit start relay
2.产 品 展 示
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