Gasonics 03470-01输入调节电容器 PDF资料
1.产 品 资 料 介 绍:
产品名称:Gasonics 03470-01 输入调节电容器
部件类型:高压输入滤波/缓冲电容器
主要功能:用于稳定电源输入信号,滤除电压尖峰与高频干扰,提升系统供电质量
一、等离子体处理设备电源输入回路
该电容器模块安装于 Gasonics 等离子清洗设备(如 Aura、L3500、P5000 系列)的主电源输入端,用于对输入电压进行滤波与暂态稳定处理。
典型用途:
平滑整流后的直流电压波动
吸收高频开关干扰与电磁噪声
提供瞬时功率支持,避免系统掉电
二、射频功率系统滤波缓冲
在等离子发生器或 RF 电源模块中,03470-01 可作为缓冲电容使用,减轻射频开关电源对主电网的反冲影响。
作用表现:
降低 RF 电源输出端的电压尖峰
减小功率开关器件的EMI辐射
保护下游模块如功率放大器、控制板免受电压波动影响
三、主控电源保护与延寿
电容器是电源控制模块中寿命决定性元件之一。03470-01 电容器通过吸收输入瞬态电压,降低系统负载冲击,延长主控板、I/O 板及逻辑模块的使用寿命。
应用模块包括:
电源控制器(如 A90-027-01)
步进驱动器供电缓冲
RF 控制器与腔体接口控制模块
英文资料:
Product Name: Gasonics 03470-01 Input Regulating Capacitor
Component type: High voltage input filter/buffer capacitor
Main function: Used to stabilize power input signals, filter out voltage spikes and high-frequency interference, and improve system power supply quality
1、 Power input circuit for plasma processing equipment
This capacitor module is installed on the main power input terminal of Gasonics plasma cleaning equipment (such as Aura, L3500, P5000 series), used for filtering and transient stability processing of input voltage.
Typical use:
Smooth rectified DC voltage fluctuation
Absorbing high-frequency switch interference and electromagnetic noise
Provide instantaneous power support to avoid system power failure
2、 RF power system filtering buffer
In plasma generators or RF power modules, 03470-01 can be used as a buffer capacitor to reduce the impact of RF switching power on the main power grid.
Function performance:
Reduce voltage spikes at the output of RF power supply
Reduce EMI radiation of power switching devices
Protect downstream modules such as power amplifiers and control boards from voltage fluctuations
3、 Main control power protection and lifespan extension
Capacitors are one of the life determining components in power control modules. The 03470-01 capacitor absorbs input transient voltage, reduces system load shock, and extends the service life of the main control board, I/O board, and logic module.
The application module includes:
Power controller (such as A90-027-01)
Stepper driver power buffer
RF controller and cavity interface control module
2.产 品 展 示
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