Gasonics A90-029-03升降板 PDF资料
1.产 品 资 料 介 绍：
产品名称：Gasonics A90-029-03 升降板
部件类型：晶圆承载升降机构组件（Wafer Lift Plate）
主要功能：用于在等离子处理设备中实现晶圆的垂直升降，用于搬运、对接和处理位置切换
一、等离子清洗设备中的晶圆处理模块
Gasonics A90-029-03 升降板是 Gasonics 系统（如 Aura 系列、L3500 等）内部晶圆搬运机构的一部分，负责在 wafer 从 Load Lock 或处理腔体中上下移动时提供支撑。
典型用途：
将晶圆从传输位置升起或降下以完成装载/卸载
在处理腔体中精确定位晶圆高度，确保工艺均匀性
配合电梯机构完成晶圆对接动作
二、Load Lock 模块配套升降结构
该升降板通常安装在 Load Lock 升降机构末端，是晶圆与升降电机之间的直接接触平台。
配合组件：
步进电机驱动器（如 RD-323M10）
电梯升降导轨系统
晶圆托盘或真空吸附平台
三、晶圆上下料流程中的定位机构
升降板用于晶圆搬运过程中，实现不同流程节点的精准高度切换，有助于提升处理效率与防止晶圆划伤。
具体应用：
上料平台将晶圆抬起至处理腔入口高度
工艺完成后将晶圆下降至输出托盘对接位置
多层 wafer 工位系统中进行层间切换
英文资料：
Product Name: Gasonics A90-029-03 Lift Plate
Component type: Wafer Lift Plate
Main function: Used for vertical lifting and lowering of wafers in plasma processing equipment, for handling, docking, and switching of processing positions
1、 Wafer processing module in plasma cleaning equipment
The Gasonics A90-029-03 lift plate is part of the internal wafer handling mechanism of Gasonics systems (such as Aura series, L3500, etc.), responsible for providing support when the wafer moves up and down from the load lock or processing chamber.
Typical use:
Raise or lower the wafer from the transfer position to complete loading/unloading
Accurately positioning the wafer height in the processing chamber to ensure process uniformity
Cooperate with the elevator mechanism to complete the wafer docking action
2、 Load Lock module with lifting structure
The lifting plate is usually installed at the end of the Load Lock lifting mechanism and serves as a direct contact platform between the wafer and the lifting motor.
Collaborative components:
Stepper motor driver (such as RD-323M10)
Elevator lifting guide rail system
Wafer tray or vacuum adsorption platform
3、 Positioning mechanism in wafer loading and unloading process
The lifting plate is used in the wafer handling process to achieve precise height switching between different process nodes, which helps to improve processing efficiency and prevent wafer scratches.
Specific application:
The loading platform lifts the wafer to the height of the processing chamber entrance
After the process is completed, lower the wafer to the output tray docking position
Inter layer switching in a multi-layer wafer workstation system
2.产 品 展 示
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