Gasonics A90-027-01电源控制器 PDF资料
1.产 品 资 料 介 绍：
产品名称：Gasonics A90-027-01 电源控制器
部件类型：电源控制器模块（Power Controller Module）
主要功能：对 Gasonics 等离子体处理系统中的多路电源进行集中控制、分配与保护
一、等离子清洗设备电源管理系统
该模块广泛应用于 Gasonics 系列（如 Aura、L3500、P5000 等）等离子清洗设备中，作为设备内部的电源总控单元。
典型用途：
控制主电源的启停与切换
向各功能模块（如RF、气体流量控制、驱动板）分配稳定电压
提供过流、过压、欠压等状态监控与保护
二、射频电源和加热系统的联动控制
在等离子处理过程中，A90-027-01 控制器用于协调射频电源（RF Generator）与加热模块等高功率负载之间的供电关系。
控制作用：
确保加热器与 RF 模块供电时序正确
限制瞬间启动时的浪涌电流
实现功率阶段切换和故障联锁
三、设备安全互锁与联动保护系统
电源控制器还承担了设备内部安全互锁系统的供电中枢角色，负责电源的顺序激活与异常断电控制。
相关模块控制对象：
负载锁电梯控制电源
腔体真空泵、冷却水系统供电
安全报警与互锁电路供电逻辑控制
英文资料：
Product Name: Gasonics A90-027-01 Power Controller
Component type: Power Controller Module
Main function: Centralize control, distribution, and protection of multiple power sources in Gasonics plasma processing systems
1、 Power Management System for Plasma Cleaning Equipment
This module is widely used in Gasonics series (such as Aura, L3500, P5000, etc.) plasma cleaning equipment as the internal power control unit of the equipment.
Typical use:
Control the start stop and switching of the main power supply
Allocate stable voltage to various functional modules (such as RF, gas flow control, driver board)
Provide status monitoring and protection for overcurrent, overvoltage, undervoltage, etc
2、 Linkage control of RF power supply and heating system
During plasma processing, the A90-027-01 controller is used to coordinate the power supply relationship between the RF generator and high-power loads such as heating modules.
Control function:
Ensure that the power supply timing of the heater and RF module is correct
Limit surge current during instantaneous startup
Realize power phase switching and fault interlocking
3、 Equipment safety interlock and linkage protection system
The power controller also plays the role of the power supply center for the internal safety interlock system of the equipment, responsible for the sequential activation and abnormal power-off control of the power supply.
Related module control objects:
Load lock elevator control power supply
Power supply for cavity vacuum pump and cooling water system
Security alarm and interlock circuit power supply logic control
2.产 品 展 示
3.其他产品
BENTLY 3500/22M 146031-01瞬态数据接口模块
KOLLMORGEN AKM42E-EKGNR-01伺服电机
4.其他英文产品
ABB 70EB01b-E digital input module
ABB 70BV05a-ES bus controller module
| 33VM62-028-5 | 3090-SCCT164 | IC3600VORA1 |
| 33VM62-020-20 | 3090-SCCT124 | IC3600VMPA1E |
| 33VM62-000-76 | 3090-SCCT084 | IC3600VMPA1 |
| 33VM62-000-75 | 3090-SCCT083 | IC3600VLEB1A |
| 33VM62-000-21 | 3090-SCCT063 | IC3600VLEA1 |
| 33VM62-000-17 | 3090-SCCT043 | IC3600VDAC1C |
