Gasonics 95-0203-03电源模块 PDF资料
1.产 品 资 料 介 绍：
产品名称：Gasonics 95-0203-03 电源模块
功能定位：为等离子体处理系统提供稳定电压与电流供应的核心部件
一、Gasonics 等离子灰化/清洗设备供电系统
该模块广泛应用于 Gasonics 旗下如 Aura、L3500、PEP 系列等离子清洗设备，用于为整机或某一关键子系统提供所需的电压、电流与信号隔离。
典型功能：
给控制逻辑板、传感器、执行器供电
稳定处理腔体中的射频（RF）或直流电路负载
提供不同电压输出（如 ±15V、5V、24V 等）供系统子板使用
二、真空处理系统中的电力支持单元
该电源模块用于支撑真空腔体中多个电动组件（如负载锁电梯、真空泵接口、阀门控制）的正常运行。
适用系统部件：
Wafer Elevator（晶圆升降机构）
Load Lock Valve（负载锁阀门）
Process Chamber I/O 接口控制板
安全互锁模块的电源输入端
三、Gasonics 控制系统的电源核心
电源模块是整机控制板组的基础支撑，确保 CPU 主控板、I/O 板、显示/监控模块的电压稳定。
相关控制模块供电对象：
主控 CPU 控制板
等离子腔体气体流量控制板
温度/压力反馈传感器
系统安全报警装置与继电器模块
英文资料：
Product Name: Gasonics 95-0203-03 Power Module
Functional positioning: The core component that provides stable voltage and current supply for plasma processing systems
1、 Gasonics plasma ashing/cleaning equipment power supply system
This module is widely used in Gasonics' plasma cleaning equipment such as Aura, L3500, and PEP series, to provide the required voltage, current, and signal isolation for the entire machine or a critical subsystem.
Typical functions:
Provide power to the control logic board, sensors, and actuators
Stabilize RF or DC circuit loads in the processing chamber
Provide different voltage outputs (such as ± 15V, 5V, 24V, etc.) for system daughter board use
2、 Power support unit in vacuum processing system
This power module is used to support the normal operation of multiple electric components in the vacuum chamber, such as load lock elevators, vacuum pump interfaces, and valve controls.
Applicable system components:
Wafer Elevator
Load Lock Valve
Process Chamber I/O Interface Control Board
Power input terminal of safety interlock module
3、 The power core of Gasonics control system
The power module is the basic support of the entire control board group, ensuring the voltage stability of the CPU main control board, I/O board, and display/monitoring module.
Related control module power supply objects:
Main control CPU control board
Plasma chamber gas flow control board
Temperature/pressure feedback sensor
System safety alarm device and relay module
2.产 品 展 示
3.其他产品
BENTLY 3500/22M 146031-01瞬态数据接口模块
4.其他英文产品
ABB 70BK03c-E Control I/O Module
| 36-0201 | 531X300CCHAXM3 | IMDSI14 |
| 345-L-P0-G0-H-E-M-N-N-SN-N-N | 531X300CCHAWM3 | IMCIS22 |
| 345-E-P5-G5-L-E-S-N-N-1E-D-H | 531X300CCHATM3 | IC3603A177AF6 |
| 345-E-P5-G5-H-E-S-N-N-SN-D-N | 531X300CCHASM3 | IC3603A177AF2 |
| 345-E-P5-G5-H-E-S-N-N-3E-D-N | 531X300CCHANM3 | IC3603A177AD2 |
| 345-E-P5-G5-H-E-S-N-N-1E-D-H | 531X300CCHAMM3 | IC3603A177AB2 |
