Gasonics 95-0320-01调节器组件 PDF资料
1.产 品 资 料 介 绍：
一、产品概述
Gasonics 95-0320-01 是用于 Gasonics 等离子处理设备中的 气压调节器组件（Regulator Assembly），其主要作用是在设备运行过程中，对进入工艺腔体或负载锁的气体压力进行精准调控，确保设备在设定的气体流量和压力下稳定运行。该组件通常集成了高精度调压阀、气体接口、压力表及相关固定结构，是整个气体输送系统中的关键部件。
二、应用领域
1. 等离子清洗与剥离设备
控制进入处理腔的工艺气体（如O₂、Ar、N₂等）压力；
保持等离子反应稳定，避免过压或欠压引起的工艺失效。
2. 负载锁腔体气压控制
对真空腔体进行背压充气，保证门体开启的安全性；
保障晶圆搬运过程中腔体压力符合设定要求。
3. 真空与惰性气体输送系统
应用于设备气源分配通道中，实现局部精密调压；
支持联动电磁阀、流量计等设备模块。
英文资料：
1、 Product Overview
Gasonics 95-0320-01 is a regulator assembly used in Gasonics plasma processing equipment. Its main function is to accurately regulate the gas pressure entering the process chamber or load lock during equipment operation, ensuring stable operation of the equipment at the set gas flow rate and pressure. This component typically integrates high-precision pressure regulators, gas interfaces, pressure gauges, and related fixed structures, and is a key component in the entire gas delivery system.
2、 Application Fields
1. Plasma cleaning and stripping equipment
Control the pressure of process gases (such as O ₂, Ar, N ₂, etc.) entering the processing chamber;
Maintain stable plasma reaction to avoid process failure caused by overvoltage or undervoltage.
2. Load lock chamber air pressure control
Inflate the vacuum chamber with back pressure to ensure the safety of the door opening;
Ensure that the chamber pressure meets the set requirements during wafer handling.
3. Vacuum and inert gas delivery system
Applied in the equipment air supply distribution channel to achieve local precision pressure regulation;
Support the linkage of equipment modules such as solenoid valves and flow meters.
2.产 品 展 示
3.其他产品
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| 6410-006-N-N-N | 6DD1670-0AG0 | TRICONEX 8100 |
| 6410-005 | 6DD1670-0AF0 | TRICONEX 8305 |
| 6410-001-N-N-N-LF | 6DD1663-0AB0 | TRICONEX 4509 |
| 6410-001-N-N-N | 6DD1662-0AC0 | TRICONEX 3720 |
| 6410-001-N-N-K | 6DD1662-0AB0 | TRICONEX 2770H |
| 6410-001-N-H-K | 6DD1661-0AE1 | 6ES5395-0UA11 |
