Gasonics A95-122-01负载锁门组件 PDF资料
1.产 品 资 料 介 绍：
一、产品概述
Gasonics A95-122-01 是专用于 Gasonics 等离子设备（如 Aura、PEP 系列）负载锁系统的 门体执行组件，负责在晶圆装载和卸载过程中实现真空腔体的物理密封与开启。该门组件集成了机械驱动结构、密封系统、感应传感器和互锁接口，用于保障负载锁腔体在真空环境下安全运行，是整机系统中关键的真空隔离单元。
二、应用领域
1. 半导体设备中的负载锁（Loadlock）系统
实现与主处理腔之间的密封隔离；
控制腔体气压稳定前后的开闭动作；
联动控制晶圆传输机械臂和升降系统。
2. 等离子清洗 / 去胶设备（如 Gasonics Aura 3010、PEP 3510 等）
用于晶圆进出时确保高真空密封完整性；
支持自动门锁机构控制与状态感知反馈。
英文资料：
1、 Product Overview
Gasonics A95-122-01 is a door actuator component specifically designed for load lock systems in Gasonics plasma equipment (such as Aura, PEP series), responsible for achieving physical sealing and opening of vacuum chambers during wafer loading and unloading processes. This door component integrates mechanical drive structure, sealing system, sensing sensors, and interlocking interfaces to ensure the safe operation of the load lock chamber in a vacuum environment. It is a key vacuum isolation unit in the entire system.
2、 Application Fields
1. Load lock system in semiconductor equipment
Implement sealed isolation from the main processing chamber;
Control the opening and closing actions before and after stabilizing the chamber pressure;
Linkage control of wafer transfer robotic arm and lifting system.
2. Plasma cleaning/debonding equipment (such as Gasonics Aura 3010, PEP 3510, etc.)
Used to ensure high vacuum sealing integrity during wafer entry and exit;
Support automatic door lock mechanism control and status perception feedback.
2.产 品 展 示
3.其他产品
4.其他英文产品
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| 6415-001-C-N-K | 6DD1681-0AH1 | TRICONEX 3501E |
| 6415-001-C-M-K | 6DD1681-0AG2 | TRICONEX 3601E |
| 6415-001-C-H-K | 6DD1681-0AF4 | TRICONEX 3805H |
| 6410-031-N-N-N | 6DD1681-0AF3 | TRICONEX 3502E |
| 6410-030-N-N-N | 6DD1681-0AE2 | TRICONEX 9668-110 |
| 6410-024-N-N-N | 6DD1681-0AE1 | TRICONEX 4000164-520 |
| 6410-024-C-N-N | 6DD1680-0BB0 | TRICONEX 4118 |
