Gasonics C12101-E变压器 PDF资料
1.产 品 资 料 介 绍:
一、产品概述
Gasonics C12101-E 是 Gasonics 等离子设备(如 Aura、PEP 系列)中使用的 专用工业变压器模块,用于将输入电压转换为设备所需的多个工作电压(如 ±15V、24V、5V 等),以驱动控制系统、传感器、执行器和其他电路模块。该变压器具备高绝缘性和良好的电磁兼容性能,是设备电源系统的关键组成部分。
二、应用领域
1. 等离子清洗/去胶设备(Plasma Asher)
为控制电路、驱动模块、接口板等提供稳定隔离电源;
用于腔体内部和负载锁模块中的电气分配系统。
2. 设备子系统电源模块
供电对象可能包括:气阀控制、电机驱动、故障检测模块、升降平台等;
与主电源板协同工作,完成多级电压转换与电气隔离。
3. 信号调理与隔离场合
用于模拟信号/数字信号传输系统中的电压隔离保护;
防止电气噪声或过电流对主系统造成干扰或损坏。
英文资料:
1、 Product Overview
Gasonics C12101-E is a specialized industrial transformer module used in Gasonics plasma equipment (such as Aura, PEP series) to convert input voltage into multiple operating voltages required by the equipment (such as ± 15V, 24V, 5V, etc.) to drive control systems, sensors, actuators, and other circuit modules. This transformer has high insulation and good electromagnetic compatibility performance, and is a key component of the equipment power system.
2、 Application Fields
1. Plasma cleaning/debonding equipment (Plasma Asher)
Provide stable isolated power supply for control circuits, driver modules, interface boards, etc;
Used for electrical distribution systems inside chambers and load lock modules.
2. Equipment subsystem power module
The power supply objects may include: air valve control, motor drive, fault detection module, lifting platform, etc;
Collaborate with the main power board to complete multi-level voltage conversion and electrical isolation.
3. Signal conditioning and isolation scenarios
Used for voltage isolation protection in analog/digital signal transmission systems;
Prevent electrical noise or overcurrent from interfering with or damaging the main system.
2.产 品 展 示
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