Gasonics 95-1260 C操作界面面板 PDF资料
1.产 品 资 料 介 绍：
一、产品概述
Gasonics 95-1260 C 是一款专为 Gasonics 等离子处理设备设计的 操作界面面板（Operator Interface Panel），用于人机交互，操作者通过该面板对设备运行状态进行控制、监控和参数设定，是设备控制系统的核心输入/输出装置之一。
该面板通常包括显示屏（可能为LCD/LED）、功能按键、状态指示灯等，集成在设备前端控制台上。
二、技术参数简述（典型特征，具体型号以实物为准）
显示形式：集成LCD或LED显示屏
按键布局：功能按键/软键/导航键组合
通信接口：与主控PLC或嵌入式控制器通过串行或并行接口通信
安装方式：面板式安装，嵌入式前盖
适配设备：常用于 Gasonics Aura、PEP、L3510、L3512 等设备型号
三、应用场景
1. 等离子剥离设备（Plasma Asher/Descum）
用于设定工艺参数（如气体流量、功率、温度、时间等），并监视腔体状态（真空、报警等），支持运行启动/停止、工艺选择等功能。
2. 等离子清洗/表面处理设备
面板用于操作表面处理系统，实现对工艺过程的全程控制，提升用户交互效率。
3. 负载锁控制界面
作为负载锁腔体上下片、抽真空、充气等过程的直接控制接口，简化操作流程，避免误操作。
4. 实验室/工艺开发平台
在R&D系统或大学/研究所使用的半导体实验平台中，提供本地可视化和调试功能。
英文资料：
1、 Product Overview
Gasonics 95-1260 C is an Operator Interface Panel designed specifically for Gasonics plasma processing equipment. It is used for human-machine interaction, allowing operators to control, monitor, and set parameters for the equipment's operating status. It is one of the core input/output devices of the equipment control system.
This panel typically includes a display screen (possibly LCD/LED), function buttons, status indicator lights, etc., integrated into the front console of the device.
2、 Technical parameter description (typical features, specific models subject to physical objects)
Display format: Integrated LCD or LED display screen
Key layout: combination of function keys/soft keys/navigation keys
Communication interface: Communicate with the main control PLC or embedded controller through serial or parallel interface
Installation method: panel installation, embedded front cover
Compatible devices: commonly used for equipment models such as Gasonics Aura, PEP, L3510, L3512, etc
3、 Application scenarios
1. Plasma Asher/Descum equipment
Used to set process parameters (such as gas flow rate, power, temperature, time, etc.), monitor chamber status (vacuum, alarm, etc.), support operation start/stop, process selection and other functions.
2. Plasma cleaning/surface treatment equipment
The panel is used to operate the surface treatment system, achieve full control of the process, and improve user interaction efficiency.
3. Load lock control interface
As a direct control interface for the loading and unloading, vacuuming, inflation and other processes of the load lock chamber, it simplifies the operation process and avoids misoperation.
4. Laboratory/Process Development Platform
Provide local visualization and debugging functions in semiconductor experimental platforms used in R&D systems or universities/research institutes.
2.产 品 展 示
3.其他产品
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