Gasonics 73797-04 控制模块 PDF资料
1.产 品 资 料 介 绍：
Gasonics 73797-04 控制模块
产品功能与作用：
作为 Gasonics 等离子体处理设备中的关键控制单元，主要用于逻辑运算、信号处理和子系统协调。
控制功率、气体流量、火控逻辑、电源状态、互锁系统等核心功能。
提供设备运行状态反馈，实现精密工艺控制。
应用领域：
半导体晶圆去胶和清洗设备（如 Aura 和 PEP 系列）
等离子体剥离、蚀刻、表面清洁等工艺设备
显示面板制造中的薄膜处理系统
微电子器件封装线中的自动化控制平台
高洁净度实验室或定制型等离子系统中的关键控制板
特点：
工业级电路板设计，具备抗干扰和长寿命性能
与 Gasonics 系列设备主控系统配套使用
支持信号稳定传输及故障联锁保护功能
英文资料：
Gasonics 73797-04 Control Module
Product Function and Function:
As a key control unit in Gasonics plasma processing equipment, it is mainly used for logic operations, signal processing, and subsystem coordination.
Control core functions such as power, gas flow, fire control logic, power status, interlock system, etc.
Provide feedback on equipment operation status to achieve precision process control.
Application areas:
Semiconductor wafer debonding and cleaning equipment (such as Aura and PEP series)
Process equipment for plasma stripping, etching, surface cleaning, etc
Thin film processing system in display panel manufacturing
Automation Control Platform in Microelectronics Device Packaging Line
Key control boards in high cleanliness laboratories or customized plasma systems
characteristic:
Industrial grade circuit board design with anti-interference and long-life performance
Used in conjunction with the main control system of Gasonics series equipment
Support stable signal transmission and fault interlock protection function
2.产 品 展 示
3.其他产品
ABB SM810K01 3BSE030928R1总线互连模块
4.其他英文产品
ASEA 2668 184-447 Communication Module
RadiSys 61-0475-12 Axis Control Module
RADISYS 97-9536-20 Ethernet Port Module
| 8030-PS-10 | 6SC6500-0BC01 | X-DI 32 0 |
| 8030-LRK-100 | 531X301DCCAM1 | X-AI 32 01 |
| 8030-LOM112 | 531X301DCCALM1 | X-DO 12 5 |
| 8030-LOM-111 | 531X301DCCAKM1 | X-DO 12 01 |
| 8030-LIM-112 | 8030-CRM-211 | X-AO 16 5 |
| 8030-LIM-111 | 8030-CRM-210 | X-AI 16 51 |
