Gasonics 73-0068电梯对准工具 PDF资料 

1.产 品 资 料 介 绍：

英文资料：

Gasonics 73-0068 Elevator Alignment Tool

Brief introduction

Name: Elevator Alignment Tool

Part number: 73-0068

Applicable models: Gasonics plasma processing equipment (such as A-2000, Aura, PEP series)

Purpose: Used for mechanical alignment and position correction of elevator platforms in load lock chambers or process chambers

Equipment Type: Specialized Calibration/Maintenance Assistance Tool

2、 Functional purpose

This tool is used to ensure that the elevator lifting platform is in a precise vertical travel and horizontal positioning state before or after equipment operation or maintenance, ensuring that the alignment accuracy between the wafer and the transfer robotic arm meets the standard, and avoiding:

Wafer transfer failure

Platform and robotic arm interference

Wafer placement offset or fragmentation

The cavity door cannot be closed correctly

4、 Overview of usage methods

Install alignment tool: Fix the 73-0068 tool on the elevator platform or specific calibration fixture position

Manual/software controlled lifting: Move the platform to the designated "alignment reference point"

Use a feeler gauge or visual inspection platform to check the gap between the platform and the reference edge

Adjust the initial position of the mechanical limit screw or motor (if any)

Repeatedly testing the wafer grasping and releasing accuracy of the transmission robotic arm

5、 Precautions

The tool should be used in conjunction with the original factory standard cavity (note the code and cavity model)

Ensure that the platform is free of debris and the tray is not warped before use

Operators should wear gloves and use anti-static tools

If combined with software calibration, the motion table parameters should be confirmed synchronously

2.产      品      展      示      

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本篇文章出自瑞昌明盛自动化设备有限公司官网，转载请附上此链接:http://www.jiangxidcs

品牌：Gasonics

型号：73-0068电梯对准工具

质保：一年

成色：全新/二手

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特点：主营产品各种模块/卡件，控制器，触摸屏，伺服驱动器。

应用行业：广泛应用于冶金、石油天然气、玻璃制造业、铝业、石油化工、煤矿、造纸印刷、纺织印染、机械、电子制造、汽车制造、烟草、塑胶机械、电力、水利、水处理/环保、市政工程、锅炉供暖、能源、输配电等

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