Gasonics 94-1174顶级索引器 PDF资料
1.产 品 资 料 介 绍:
Gasonics 94-1174 顶级索引器(Top Indexer) 是一款用于 Gasonics 等离子体剥离系统中的晶圆定位与搬运子组件,通常负责在晶圆处理过程中对晶圆进行精确的顶部定位、提升或装卸操作,是自动化晶圆搬运系统(Wafer Handling System)中非常关键的执行机构之一。
一、产品概述
Gasonics 94-1174 顶级索引器(Top Indexer)是一种机械-气动或电动组合驱动的定位装置,主要安装在设备的晶圆搬运区(如Load Station或Transfer Chamber)顶部,配合机械手臂、升降平台等机构使用,用于完成晶圆在Z轴方向上的精密定位与短距离垂直移动。
二、技术功能
功能类别 | 功能说明 |
---|---|
晶圆精密定位 | 对晶圆进行X-Y或Z轴方向的微调,确保放置对中,便于进入处理腔体 |
上下移动(Z方向) | 在晶圆搬运过程中进行垂直升降,协助上片/下片 |
传感器反馈 | 内建接近/光电传感器,用于检测晶圆是否就位或是否偏移 |
自动同步控制 | 与主控制系统或机器人搬运程序配合,实现自动流程联动 |
三、应用场景
Gasonics 94-1174 顶级索引器广泛用于以下设备和场景:
Gasonics 等离子体剥离设备中的上片/下片区域
典型如 Aura 2000、PEP 3510、L3510 系列中,负责晶圆进入处理腔前的初始对准
自动晶圆搬运系统中的定位装置
搭配真空机械臂、旋转平台或水平传送轨道进行协同定位
晶圆检测与预对准工序
在处理前对晶圆表面状态进行扫描、定位缺口(Notch)或对准参考边
英文资料:
The Gasonics 94-1174 Top Indexer is a wafer positioning and handling sub component used in Gasonics plasma stripping systems, typically responsible for precise top positioning, lifting, or loading/unloading operations of wafers during wafer processing. It is one of the critical actuators in automated wafer handling systems.
1、 Product Overview
Gasonics 94-1174 Top Indexer is a mechanical pneumatic or electric combination driven positioning device, mainly installed at the top of the wafer handling area (such as Load Station or Transfer Chamber) of the equipment, used in conjunction with mechanical arms, lifting platforms and other mechanisms to achieve precise positioning and short distance vertical movement of wafers in the Z-axis direction.
2、 Technical functions
Function Category Function Description
Precision wafer positioning fine tunes the wafer in the X-Y or Z-axis direction to ensure alignment and facilitate entry into the processing chamber
Vertical lifting and lowering (in the Z direction) during wafer handling to assist in loading/unloading wafers
Sensor feedback built-in proximity/photoelectric sensor, used to detect whether the wafer is in place or offset
Automatic synchronization control is coordinated with the main control system or robot handling program to achieve automatic process linkage
3、 Application scenarios
The Gasonics 94-1174 top-level indexer is widely used in the following devices and scenarios:
Upper/lower wafer area in Gasonics plasma stripping equipment
Typical examples include Aura 2000, PEP 3510, and L3510 series, which are responsible for the initial alignment of wafers before entering the processing chamber
Positioning device in automatic wafer handling system
Coordinated positioning with vacuum robotic arm, rotating platform or horizontal conveyor track
Wafer inspection and pre alignment process
Scan, locate notches or align reference edges on the surface of the wafer before processing
2.产 品 展 示
3.其他产品
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