Gasonics R94-1163步进驱动器 PDF资料
1.产 品 资 料 介 绍：
Gasonics R94-1163 步进驱动器 产品应用领域
半导体制造设备
用于晶圆搬运设备（EFEM）中，实现晶圆的精确搬运和放置。
应用于光刻机和刻蚀设备中的定位系统，确保工艺的高精度和稳定性。
支持自动化处理设备中的运动控制，提升设备响应速度和加工精度。
精密自动化设备
适用于工业机器人中的步进电机驱动，实现复杂路径的高精度运动。
用于自动化测试系统中的机械手臂和定位装置，提高测试效率和重复性。
科研与实验设备
在实验室自动化平台中应用，支持微细动作控制和多轴协调。
用于开发和调试高精度机械系统，满足复杂工艺需求。
其他工业应用
适合需要高分辨率运动控制的机械加工设备和装配线。
可集成于各种自动化生产线，提高生产稳定性和设备寿命。
这款步进驱动器以其高精度、稳定性和兼容性，广泛应用于各类要求精准运动控制的场景，是半导体和自动化领域的重要驱动模块。
英文资料：
Gasonics R94-1163 Stepper Driver Product Application Fields
Semiconductor Manufacturing Equipment
Used in wafer handling equipment (EFEM) to achieve precise handling and placement of wafers.
The positioning system applied in lithography machines and etching equipment ensures high precision and stability of the process.
Support motion control in automated processing equipment to improve equipment response speed and processing accuracy.
Precision automation equipment
Suitable for driving stepper motors in industrial robots to achieve high-precision motion along complex paths.
Used for robotic arms and positioning devices in automated testing systems to improve testing efficiency and repeatability.
Research and experimental equipment
Applied in laboratory automation platform, supporting fine motion control and multi axis coordination.
Used for developing and debugging high-precision mechanical systems to meet complex process requirements.
Other industrial applications
Suitable for mechanical processing equipment and assembly lines that require high-resolution motion control.
Can be integrated into various automated production lines to improve production stability and equipment lifespan.
This stepper driver is widely used in various scenarios that require precise motion control due to its high precision, stability, and compatibility. It is an important driving module in the semiconductor and automation fields.
2.产 品 展 示
3.其他产品
4.其他英文产品
ASEA SNAT7600 driver control circuit board
ABB 3DDE300417 Input/Output Board
| K33HLHM-LNK-NS-00 | AMAT 0100-40029 | INSEM01 |
| K33HLHJ-LNK-NS-01 | AMAT 0100-14006 | INICT12 |
| K33HLHJ-LNK-NS-00 | AMAT 0100-00146 | INSEM11 |
| K33HLFM-LNK-NS-00 | AMAT 0100-90251 | INICT01 |
| K33HCHJ-LNK-NS-00 | AMAT 0100-90702 | IMASI23 |
| K32HSFL-LNK-NS-02 | AMAT 0100-3527 | 3500/91-01-02-00 |
