Gasonics GL139微波发电机 PDF资料
1.产 品 资 料 介 绍：
产品名称
Gasonics GL139 微波发电机
产品概述
Gasonics GL139 是一款专为等离子体工艺设备设计的工业级微波发电模块。其主要任务是为等离子体反应腔提供稳定且连续的高频微波功率，以激发和维持等离子体环境。该型号广泛用于 Gasonics L3500、L3510 等等离子清洗和剥离设备。
技术特性（典型）
输出功率：约 1250 瓦
供电电压：190–240 VAC
冷却方式：水冷
搭配磁控管型号：GL130 或等效型号
安装位置：设备背部或底部微波仓区域，连接波导传输路径
应用领域
半导体晶圆等离子清洗
应用于光刻胶去除、表面预处理、微粒去除等过程。
通过稳定微波激发，提高等离子体均匀性和处理效率。
等离子体去胶（灰化）工艺
在光刻后的去胶步骤中，作为能量源维持氧等离子体，对晶圆表面有机物进行分解。
支持高产能的连续批量处理。
实验室与工艺开发
用于研发环境中开发新型微波激发参数或优化清洗工艺。
适用于不同气体条件与腔体配置的微波激发实验。
设备维护与替换
可作为原厂微波电源的替代件，用于 Aura、L 系列等设备的维护或系统升级。
英文资料：
product name
Gasonics GL139 Microwave Generator
product overview
Gasonics GL139 is an industrial grade microwave power generation module designed specifically for plasma process equipment. Its main task is to provide stable and continuous high-frequency microwave power for the plasma reaction chamber to excite and maintain the plasma environment. This model is widely used in plasma cleaning and stripping equipment such as Gasonics L3500 and L3510.
Technical characteristics (typical)
Output power: approximately 1250 watts
Supply voltage: 190-240 VAC
Cooling method: Water cooling
Matching magnetron model: GL130 or equivalent model
Installation location: microwave compartment area at the back or bottom of the device, connected to the waveguide transmission path
application area
Semiconductor wafer plasma cleaning
Applied to processes such as photoresist removal, surface pretreatment, and particle removal.
By stabilizing microwave excitation, plasma uniformity and processing efficiency can be improved.
Plasma de gelation (ashing) process
In the de etching step after photolithography, oxygen plasma is maintained as an energy source to decompose organic matter on the wafer surface.
Support high-capacity continuous batch processing.
Laboratory and Process Development
Used for developing new microwave excitation parameters or optimizing cleaning processes in research and development environments.
Suitable for microwave excitation experiments under different gas conditions and chamber configurations.
Equipment maintenance and replacement
Can be used as a substitute for original microwave power supplies for maintenance or system upgrades of Aura, L series and other equipment.
2.产 品 展 示
3.其他产品
ABB PHARPS32000000 F8G2B3B6 电源模块
GE 516TX 336A4940DNP516TX 输入输出模块
4.其他英文产品
ABB SB822 3BSE018172R1 rechargeable
ABB XVC768115 thyristor module
| PMA22B-00100-00 | AMAT 0100-00060 | PFTL-101A 3BSE008508R1 |
| PMA21B-10100-00 | AMAT 0100-00059 | PFEA112-65 |
| PMA21B-01100-00 | ANAT 0100-76091 | PFRL101A |
| PMA21B-00100-00 | AMAT 0100-00985 | PFTL 101BER-2.0KN |
| PMA13B-00100-01 | AMAT 0100-00156 | PFTL101A-2.0KN 3BSE004172R1 2.0KN |
| PMA13B-00100-00 | AMAT 0100-20097 | PFEA111-IP65 3BSE050090R65 |
