Gasonics AWD-D-2-3-002控制组件 PDF资料
1.产 品 资 料 介 绍：
产品名称
Gasonics AWD-D-2-3-002 控制组件
产品概述
该控制组件用于 Gasonics 等离子体处理系统中，担任关键控制和调节功能。它连接微波源、气体流量、真空泵、电源管理等子系统，协调设备的整体运行，确保处理流程按预设工艺参数执行。
应用领域
微波等离子体设备控制
在清洗、去胶、刻蚀等工艺中调节微波功率和系统运行状态。
Aura 系列设备核心控制系统
搭配 Aura 2000、3000、L3510 等型号，实现工艺配方控制与流程管理。
半导体生产自动化核心模块
通过监控和反馈信号，实现对设备温度、压力、流量和功率等多个参数的闭环控制。
设备维护与升级替换部件
在系统故障或升级时可替换此控制组件，以恢复或提升控制功能的可靠性。
技术优势
高度集成：支持多子系统协同工作，简化控制架构。
工艺精准：实现对微波功率、气体比例、真空度等关键参数的精细控制。
稳定可靠：具备冗余保护机制，适用于连续运行生产环境。
维护便捷：模块化设计，易于快速替换与维护。
英文资料：
product name
Gasonics AWD-D-2-3-002 Control Component
product overview
This control component is used in Gasonics plasma processing systems to perform critical control and regulation functions. It connects subsystems such as microwave source, gas flow rate, vacuum pump, power management, etc., coordinates the overall operation of the equipment, and ensures that the processing flow is executed according to preset process parameters.
application area
Control of microwave plasma equipment
Adjust microwave power and system operation status in cleaning, degumming, etching and other processes.
Aura series equipment core control system
Paired with Aura 2000, 3000, L3510 and other models, achieve process formula control and process management.
Core module of semiconductor production automation
By monitoring and providing feedback signals, closed-loop control of multiple parameters such as equipment temperature, pressure, flow rate, and power can be achieved.
Equipment maintenance and upgrading replacement parts
In the event of system failure or upgrade, this control component can be replaced to restore or enhance the reliability of the control function.
Technical advantages
Highly integrated: supports collaborative work of multiple subsystems and simplifies control architecture.
Precise craftsmanship: achieving precise control over key parameters such as microwave power, gas ratio, and vacuum degree.
Stable and reliable: equipped with redundant protection mechanism, suitable for continuous operation in production environments.
Convenient maintenance: Modular design, easy to replace and maintain quickly.
2.产 品 展 示
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