Gasonics AWD-D-3-6-002磁控波导 PDF资料 

1.产 品 资 料 介 绍：

产品概述：
该磁控波导组件主要用于将微波源（通常为磁控管）输出的微波能量高效传输到等离子体处理腔体。它是 Gasonics Aura 系列等离子清洗设备中的关键部件，保障微波功率传输的稳定性和方向性。

应用领域：

1. 半导体制造

• 用于晶圆清洗、去胶、蚀刻等等离子体工艺

• 适配 Aura 3000 / 3010 系列等离子清洗设备

2. 微波等离子激发系统

• 波导结构确保微波能量准确传输，提高等离子密度和均匀性

3. 设备维护与升级

• 在设备长期运行或磁控波导老化时，作为关键替换模块保障设备性能

4. 工艺一致性控制

• 通过稳定微波传输路径，保障工艺结果重复性

产品优势：

• 微波传输效率高，损耗小

• 与原厂设备兼容性好，便于更换

• 结构坚固，适用于洁净室环境

• 提升设备整体运行稳定性和工艺精度

英文资料：

Product Overview:

This magnetron waveguide component is mainly used to efficiently transmit the microwave energy output by a microwave source (usually a magnetron) to the plasma processing chamber. It is a key component in the Gasonics Aura series plasma cleaning equipment, ensuring the stability and directionality of microwave power transmission.

Application areas:

Semiconductor Manufacturing

Used for plasma processes such as wafer cleaning, debonding, etching, etc

Compatible with Aura 3000/3010 series plasma cleaning equipment

Microwave plasma excitation system

The waveguide structure ensures accurate transmission of microwave energy, improves plasma density and uniformity

Equipment maintenance and upgrade

As a key replacement module to ensure equipment performance during long-term operation or aging of magnetic waveguides

Process consistency control

By stabilizing the microwave transmission path, ensure the repeatability of the process results

Product advantages:

Microwave transmission has high efficiency and low loss

Good compatibility with original equipment, easy to replace

Sturdy structure, suitable for cleanroom environments

Improve the overall operational stability and process accuracy of the equipment

2.产      品      展      示      

3.其他产品

ABB 3BHE023784 控制器模块

KOLLMORGEN 60WKS-CE240 22PB 伺服驱动器

ASEA 2668 108-586机器人控制板

4.其他英文产品

ASEA E-31709 Robot Circuit Board

IS200EPSMG1ABB Analog Input Module

AMAT 0190-24282 encoder module

本篇文章出自瑞昌明盛自动化设备有限公司官网，转载请附上此链接:http://www.jiangxidcs

品牌：Gasonics

型号：AWD-D-3-6-002磁控波导

质保：一年

成色：全新/二手

优势产品：ABB、GE、FOXBORO、TRICONEX、BENTLY、A-B、MOTOROLA、HONEYWELL 、SCHNEIDER 

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特点：主营产品各种模块/卡件，控制器，触摸屏，伺服驱动器。

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