Gasonics A95-104-01 升降板 PDF资料
1.产 品 资 料 介 绍：
产品概述：
Gasonics A95-104-01 升降板是一种用于半导体制造设备中的机械升降组件，主要用于晶圆或工艺载具的垂直移动和定位。该升降板配合设备内部机械系统，实现精准的升降动作，支持晶圆转运和工艺流程中的多层次作业。
技术参数（典型）：
结构类型：机械升降平台
载重能力：适应晶圆及工艺载具的重量
运动范围：垂直方向，可实现多级定位
控制方式：配合自动化控制系统进行精准控制
材料特性：耐腐蚀、洁净室兼容材料
安装方式：设备内部固定安装
应用场景：
晶圆或载具的垂直搬运与定位
半导体等离子体处理设备中的多层工艺转换
自动化生产线内的升降作业支持
设备维护及系统升级时的机械部件替换
产品优势：
精准稳定的垂直升降动作
与Gasonics及相关设备高度兼容
材料和结构设计符合半导体洁净室要求
提升设备整体运行效率及工艺准确性
英文资料：
Product Overview:
Gasonics A95-104-01 lifting plate is a mechanical lifting component used in semiconductor manufacturing equipment, mainly for vertical movement and positioning of wafers or process carriers. The lifting plate, in conjunction with the internal mechanical system of the equipment, achieves precise lifting actions and supports multi-level operations in wafer transfer and process flow.
Technical parameters (typical):
Structure type: Mechanical lifting platform
Load capacity: Suitable for the weight of wafers and process carriers
Motion range: Vertical direction, capable of multi-level positioning
Control method: Cooperate with automated control system for precise control
Material characteristics: corrosion-resistant, cleanroom compatible material
Installation method: Fixed installation inside the device
Application scenarios:
Vertical handling and positioning of wafers or carriers
Multi layer process conversion in semiconductor plasma processing equipment
Support for lifting operations within automated production lines
Mechanical component replacement during equipment maintenance and system upgrade
Product advantages:
Accurate and stable vertical lifting action
Highly compatible with Gasonics and related equipment
The material and structural design meet the requirements of semiconductor cleanrooms
Improve the overall operational efficiency and process accuracy of the equipment
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