Gasonics  A93-021-04/C磁控波导 PDF资料 

1.产 品 资 料 介 绍：

产品概述：
Gasonics A93-021-04/C 是一款用于半导体制造设备中磁控管微波系统的磁控波导组件。该组件负责有效传输和调节磁控管产生的微波能量，支持等离子体处理工艺的稳定运行。

技术参数（典型）：

• 类型：磁控波导

• 适用设备：Gasonics Aura 2000LL 等离子体清洗设备

• 功能：传输并调节微波能量

• 结构形式：工业级金属波导管，配合磁控管和微波发射系统

• 兼容性：兼容 Gasonics Aura 系列相关设备

应用场景：

1. 等离子体激发过程中的微波能量传输

2. 半导体晶圆清洗、去胶等等离子体工艺

3. 设备维护与替换，确保微波传输系统稳定可靠

4. 与磁控管系统配合，实现高效能量转换

产品优势：

• 高效微波传输，减少能量损耗

• 与原厂设备高度兼容，便于维护替换

• 工业设计，适应严苛半导体工艺环境

• 提升等离子体处理工艺的稳定性和重复性

英文资料：

Product Overview:

Gasonics A93-021-04/C is a magnetron waveguide component used in semiconductor manufacturing equipment for magnetron microwave systems. This component is responsible for effectively transmitting and regulating the microwave energy generated by the magnetron, supporting the stable operation of plasma treatment processes.

Technical parameters (typical):

Type: Magnetron waveguide

Applicable equipment: Gasonics Aura 2000LL plasma cleaning equipment

Function: Transmit and regulate microwave energy

Structural form: Industrial grade metal waveguide tube, combined with magnetron and microwave emission system

Compatibility: Compatible with Gasonics Aura series related devices

Application scenarios:

Microwave energy transfer during plasma excitation process

Plasma processes such as semiconductor wafer cleaning and debonding

Equipment maintenance and replacement to ensure stable and reliable microwave transmission system

Cooperate with magnetron system to achieve efficient energy conversion

Product advantages:

Efficient microwave transmission reduces energy loss

Highly compatible with original equipment, easy to maintain and replace

Industrial design, adapted to harsh semiconductor process environments

Improve the stability and repeatability of plasma processing technology

2.产      品      展      示      

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本篇文章出自瑞昌明盛自动化设备有限公司官网，转载请附上此链接:http://www.jiangxidcs

品牌：Gasonics

型号：A93-021-04/C磁控波导

质保：一年

成色：全新/二手

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