Gasonics 16474-01微波电源发电机 PDF资料
1.产 品 资 料 介 绍：
产品概述：
Gasonics 16474-01 是一款工业用微波电源发电机，主要用于等离子体工艺设备中，为微波等离子激发系统提供稳定的高频功率。该设备由 Astex（后并入 Gasonics/Novellus）设计制造，常用于半导体薄膜处理、灰化、清洗及等离子体辅助蚀刻等工艺。
技术参数（典型）：
输出功率：1250 瓦（微波输出）
微波频率：2.45 GHz（工业标准频率）
输入电源：单相 AC 200–240V，50/60Hz
输出电压：约 4300 VDC（高压电源输出）
控制方式：外部模拟信号控制或设备自动控制
接口：标准工业连接器与触发端口
冷却方式：强制风冷或液冷（视具体安装版本）
外壳形式：金属封装，19 英寸机架式安装结构
应用场景：
等离子体灰化系统（Plasma Asher）
激发高能微波场，用于剥离光刻胶和杂质残留物。PECVD（等离子体增强化学气相沉积）设备
为沉积系统提供微波能量，用于生成等离子体沉积薄膜。等离子蚀刻系统
用于半导体芯片微结构加工中的等离子激发部分。Gasonics Aura 2000、L3510 系列设备
作为上述设备中的原装微波功率模块，与其他电源和控制系统协同工作。
产品优势：
输出功率稳定，频率控制精确
与Gasonics等主流旧型号设备完美兼容
模块化设计，便于更换与维护
可靠性高，适用于连续运行的半导体生产环境
可作为原厂零件用于维护、替换或系统升级
英文资料：
Product Overview:
Gasonics 16474-01 is an industrial microwave power generator mainly used in plasma process equipment to provide stable high-frequency power for microwave plasma excitation systems. This device was designed and manufactured by Astex (later incorporated into Gasonics/Novellus) and is commonly used in semiconductor thin film processing, ashing, cleaning, and plasma assisted etching processes.
Technical parameters (typical):
Output power: 1250 watts (microwave output)
Microwave frequency: 2.45 GHz (industry standard frequency)
Input power supply: single-phase AC 200-240V, 50/60Hz
Output voltage: approximately 4300 VDC (high voltage power output)
Control mode: external analog signal control or equipment automatic control
Interface: Standard industrial connectors and trigger ports
Cooling method: forced air cooling or liquid cooling (depending on the specific installation version)
Shell form: Metal encapsulation, 19 inch rack mounted structure
Application scenarios:
Plasma Asher System
Excitation of high-energy microwave field for stripping photoresist and impurity residues.
PECVD (Plasma Enhanced Chemical Vapor Deposition) equipment
Provide microwave energy to the deposition system for generating plasma deposited thin films.
Plasma etching system
Used for plasma excitation in semiconductor chip microstructure processing.
Gasonics Aura 2000, L3510 series equipment
As the original microwave power module in the above-mentioned equipment, it works in conjunction with other power sources and control systems.
Product advantages:
Stable output power and precise frequency control
Perfectly compatible with mainstream old model devices such as Gasonics
Modular design for easy replacement and maintenance
High reliability, suitable for continuous operation in semiconductor production environments
Can be used as original factory parts for maintenance, replacement, or system upgrades
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