Gasonics 94-1104微波电源发电机 PDF资料
1.产 品 资 料 介 绍：
产品概述：
Gasonics 94-1104 是一款微波电源发电机，常用于半导体工艺设备中，特别是在等离子体激发系统内，提供稳定的微波功率以激发气体形成等离子体。该组件由 Astex（后归属 Gerling/Gasonics）生产，是工业级高频微波能量源，广泛应用于PECVD、等离子刻蚀和灰化系统中。
技术参数（典型）：
输出功率：约 1250 瓦（微波输出）
输出电压：约 4300 VDC
输入电源：AC 190–240V，单相供电
工作频率：2.45 GHz（标准微波频率）
控制方式：外部控制信号或本地调节
封装形式：工业机架安装式模块
冷却方式：风冷或水冷（视版本而定）
应用场景：
等离子体激发系统
提供微波能量，用于激活反应气体形成高密度等离子体。PECVD 工艺设备
支持等离子体化学气相沉积（如薄膜沉积、介质层沉积等）。半导体蚀刻与灰化机
用于驱动等离子刻蚀或光刻胶清除系统中的微波源。Gasonics Aura 系列设备
安装于 Aura 2000、L3510 等旧型号系统中作为微波能量核心部件。
产品优势：
微波输出稳定，支持高密度等离子产生
与多款旧型号 Gasonics 工艺设备原生兼容
工业级结构，适合长期稳定运行
可作为旧设备的原装维修替换件，延长设备使用寿命
英文资料：
Product Overview:
Gasonics 94-1104 is a microwave power generator commonly used in semiconductor process equipment, especially in plasma excitation systems, to provide stable microwave power to excite gas and form plasma. This component is produced by Astex (later under Gerling/Gasnics) and is an industrial grade high-frequency microwave energy source widely used in PECVD, plasma etching, and ashing systems.
Technical parameters (typical):
Output power: approximately 1250 watts (microwave output)
Output voltage: approximately 4300 VDC
Input power supply: AC 190-240V, single-phase power supply
Operating frequency: 2.45 GHz (standard microwave frequency)
Control mode: external control signal or local adjustment
Packaging form: Industrial rack mounted module
Cooling method: air-cooled or water-cooled (depending on the version)
Application scenarios:
Plasma excitation system
Provide microwave energy for activating the reaction gas to form high-density plasma.
PECVD process equipment
Support plasma chemical vapor deposition (such as thin film deposition, dielectric layer deposition, etc.).
Semiconductor etching and ashing machine
Used to drive microwave sources in plasma etching or photoresist removal systems.
Gasonics Aura series equipment
Installed as a microwave energy core component in older models such as Aura 2000 and L3510 systems.
Product advantages:
Stable microwave output, supporting high-density plasma generation
Native compatibility with multiple old Gasonics process equipment models
Industrial grade structure, suitable for long-term stable operation
Can be used as original repair replacement parts for old equipment, extending the service life of the equipment
2.产 品 展 示
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