Gasonics A95-205-01灯照明器电源盒 PDF资料
1.产 品 资 料 介 绍：
产品概述：
Gasonics A95-205-01 是一款用于半导体等离子体设备中的灯照明器电源盒组件，主要为紫外灯或氙气灯等高强度照明系统提供稳定的电源驱动。该模块常作为 Aura 2000-LL 等机型的标准光源电源部件之一，负责点亮和维持照明光源稳定运行，支持设备在清洗、剥离和检测等工艺中的精确操作。
技术参数（典型）：
电源类型：专用灯照明器电源模块
输入电压：典型为 AC 110V 或 AC 220V（视设备配置）
输出特性：高压直流或脉冲电源，用于驱动UV/氙灯光源
适配系统：Gasonics Aura 2000-LL、AURA 1000 等旧型号剥离/清洗设备
结构形式：工业级金属封装模块，配有冷却通风设计
接口形式：多引脚连接端口，可与主系统进行同步控制
应用场景：
等离子体剥离工艺（Plasma Asher）
支持清除光刻胶、残留碳层等，在清洗过程提供高亮度照明。晶圆或掩膜检测工序
灯源照明用于缺陷检查系统，实现高对比度、高清晰度观测。半导体设备维护与故障排查照明
保证设备运行期间内部舱室的稳定照明，便于操作与维护。与 A95-053-02 搭配使用
常作为 A95-053-02 的补充电源组件，共同构成完整的照明系统。
产品优势：
具有高稳定性和抗干扰能力，保障照明系统稳定运行
与Gasonics多种老型号设备匹配良好，便于系统维修或替换
安装简便，支持快速接入原有系统
延长灯源使用寿命，提升照明效率和可靠性
英文资料：
Product Overview:
Gasonics A95-205-01 is a power box component for lighting fixtures in semiconductor plasma equipment, mainly providing stable power drive for high-intensity lighting systems such as ultraviolet lamps or xenon lamps. This module is often used as one of the standard light source power supply components for Aura 2000-LL and other models, responsible for lighting up and maintaining stable operation of lighting sources, supporting precise operation of equipment in cleaning, peeling, and testing processes.
Technical parameters (typical):
Power type: Special lighting fixture power module
Input voltage: Typically AC 110V or AC 220V (depending on equipment configuration)
Output characteristics: High voltage DC or pulse power supply, used to drive UV/xenon lamp light sources
Adaptation system: Gasonics Aura 2000-LL, AURA 1000 and other old model peeling/cleaning equipment
Structural form: Industrial grade metal packaging module, equipped with cooling and ventilation design
Interface form: Multi pin connection port, capable of synchronous control with the main system
Application scenarios:
Plasma Asher process
Support the removal of photoresist, residual carbon layers, etc., and provide high brightness illumination during the cleaning process.
Wafer or mask inspection process
Lamp source illumination is used in defect inspection systems to achieve high contrast and high-definition observation.
Semiconductor equipment maintenance and troubleshooting lighting
Ensure stable lighting in the internal cabin during equipment operation for easy operation and maintenance.
Used in conjunction with A95-053-02
Often used as a supplementary power component for A95-053-02, it together forms a complete lighting system.
Product advantages:
Has high stability and anti-interference ability, ensuring stable operation of the lighting system
Good compatibility with various old models of Gasonics equipment, easy to maintain or replace the system
Easy to install, supports quick access to existing systems
Extend the service life of the light source, improve lighting efficiency and reliability
2.产 品 展 示
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